Main Page

Welcome to the USC Nanofab Wiki! ✨
USC Nanofab Homepage

User Resources

New Users New user onboarding – Step-by-step guide to getting started Directions to the USC Nanofab – Location, parking, and access info (Michelson Center basement) Nanofab usage fees – Rates, billing Contact Nanofab Staff - Nanofab staff responsibilities and contact info

Current Users NEMO - manage tool reservations and activate tools Slack - Contact staff via Slack for operational matters, and get notified on issues and planned downtime with tools. Tool training request form - You should receive an email CC'ing you and the tool trainer. Tool list – Access SOPs for every tool Safety resources – Facility and chemical SOPs and Safety Data Sheets

Nanofab Capabilities

The O'Brien Nanofabrication Laboratory supports a wide range of micro/nano fabrication processes.

Process tools	Process recipes
Full Tool List Lithography Deposition Dry Etch Wet Processing Thermal Process Packaging/Bonding Metrology/Test PCB Processing	Dry Etching

Proudly supporting USC research in quantum, nano/bio, and beyond.