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Latest revision as of 11:57, 6 February 2026

Welcome to the USC Nanofab Wiki! ✨
USC Nanofab Homepage

User Resources

New Users

New user onboarding – Step-by-step guide to getting started
Directions to the USC Nanofab – Location, parking, and access info (Michelson Center basement)
Nanofab usage fees – Rates, billing
Contact Nanofab Staff - Nanofab staff responsibilities and contact info

Current Users

NEMO - manage tool reservations and activate tools
Slack - Contact staff via Slack for operational matters, and get notified on issues and planned downtime with tools.
Tool training request form - You should receive an email CC'ing you and the tool trainer.
Tool list – Access SOPs for every tool
Safety resources – Facility and chemical SOPs and Safety Data Sheets

Nanofab Capabilities

The O'Brien Nanofabrication Laboratory supports a wide range of micro/nano fabrication processes.

Process tools	Process recipes
Full Tool List Lithography Deposition Dry Etch Wet Processing Thermal Process Packaging/Bonding Metrology/Test PCB Processing	Dry Etching

Proudly supporting USC research in quantum, nano/bio, and beyond.

@@ Line 1: / Line 1: @@
-Welcome to the USC Nanofab wiki! ✨
+<!-- hide table of contents -->__NOTOC__
+<!-- Hide "Main Page" title -->{{DISPLAYTITLE:<span style="position: absolute; clip: rect(1px 1px 1px 1px); clip: rect(1px, 1px, 1px, 1px);">{{FULLPAGENAME}}</span>}}
-* [[New user onboarding]]
+<div style="border:2px solid #B22222; background:#FFFACD; padding:20px; margin:20px 0; border-radius:10px; text-align:center; font-size:180%; font-weight:bold; color:#B22222;">
-* [[Nanofab usage fees]]
+Welcome to the USC Nanofab Wiki! ✨
+<br>
+[https://nanofab.usc.edu/ USC Nanofab Homepage]
+</div>
-* [[Tool list]]
+<div style="border:2px solid #A9A9A9; background:#F5F5F5; padding:20px; margin:20px 0; border-radius:10px;">
+<h2 style="background:#FFFFE0; color:#B22222; border:1px solid #B22222; padding:12px; margin:0 0 15px 0; border-radius:8px; font-weight:bold; text-align:center;">User Resources</h2>
-=== External links ===
+{| style="width:100%; border-spacing:15px;"
-{| class="wikitable"
+| style="width:50%; vertical-align:top; background:#FFFFFF; border:1px solid #C0C0C0; padding:15px; border-radius:8px;" |
-|+
+<h3 style="background:#FFFACD; color:#B22222; border:1px solid #B22222; padding:8px; margin:0 0 10px 0; border-radius:5px; font-weight:bold; text-align:center;">New Users</h3>
-!Name
+* [[New user onboarding]] – Step-by-step guide to getting started
-!Description
+* [[Directions to the USC Nanofab]] – Location, parking, and access info (Michelson Center basement)
-!Link
+* [[Nanofab usage fees]] – Rates, billing
+* [[Contact Nanofab Staff]] - Nanofab staff responsibilities and contact info
+| style="width:50%; vertical-align:top; background:#FFFFFF; border:1px solid #C0C0C0; padding:15px; border-radius:8px;" |
+<h3 style="background:#FFFACD; color:#B22222; border:1px solid #B22222; padding:8px; margin:0 0 10px 0; border-radius:5px; font-weight:bold; text-align:center;">Current Users</h3>
+* [https://nemo-usc.usc.edu/ NEMO] - manage tool reservations and activate tools
+* [https://usc-nanofab.slack.com/ Slack] - Contact staff via Slack for operational matters, and get notified on issues and planned downtime with tools.
+* [https://usc.qualtrics.com/jfe/form/SV_2ccy8prA0oRcZng Tool training request form] - You should receive an email CC'ing you and the tool trainer.
+* [[Tool list]] – Access SOPs for every tool
+* [[Safety resources]] – Facility and chemical SOPs and Safety Data Sheets
+|}
+</div>
+<div style="border:2px solid #C0C0C0; background:#FFFFF0; padding:20px; margin:20px 0; border-radius:10px;">
+<h2 style="background:#FFFFE0; color:#B22222; border:1px solid #B22222; padding:12px; margin:0 0 15px 0; border-radius:8px; font-weight:bold; text-align:center;">Nanofab Capabilities</h2>
+The O'Brien Nanofabrication Laboratory supports a wide range of micro/nano fabrication processes.
+{| class="wikitable" style="width:100%;"
+! Process tools !! Process recipes
 |-
-|USC Nanofab site
+|
-|Landing page for the Nanofab facility
+* [[Tool list|Full Tool List]]
-|https://nanofab.usc.edu/
+** [[Tool list#Lithography|Lithography]]
-|-
+** [[Tool list#Deposition|Deposition]]
-|Training signup
+** [[Tool list#Dry Etching & Plasma Cleaning|Dry Etch]]
-|Signup sheets for training on specific tools
+** [[Tool list#Wet process|Wet Processing]]
-|https://usc.qualtrics.com/jfe/form/SV_9EkPzN0gLh3zmcu
+** [[Tool list#Anneal & Furnace|Thermal Process]]
-|-
+** [[Tool list#Packaging & Mechanical Tooling|Packaging/Bonding]]
-|NEMO
+** [[Tool list#Metrology|Metrology/Test]]
-|Tool access control and scheduling (USC intranet access only)
+** [[Tool list#PCB Processing|PCB Processing]]
-|https://nemo-usc.usc.edu/
+|
-|}
+* [[Dry etching recipes|Dry Etching]]
+|}</div>
+<div style="text-align:center; margin-top:30px; font-size:small; color:#A9A9A9; border-top:1px solid #C0C0C0; padding-top:20px;">
+Proudly supporting USC research in quantum, nano/bio, and beyond.
+</div>