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* [[:File:John-OBrien-Nanofabrication-Emergency-Response.pdf|Nanofab Emergency Response SOP]]
* [[:File:John-OBrien-Nanofabrication-Emergency-Response.pdf|Nanofab Emergency Response SOP]]
* [[:File:John-OBrien-Nanofabrication-Lab-Policy-Nov2021-1.pdf|Nanofab Facility Policy and Safety Manual]]
* [[:File:John-OBrien-Nanofabrication-Lab-Policy-Nov2021-1.pdf|Nanofab Facility Policy and Safety Manual]]
=== Nanofab tool SOPs ===
For tool-specific SOPs, visit the [[Tool list]] and refer to the last column.


=== Chemical SOPs ===
=== Chemical SOPs ===
Line 42: Line 45:
!Etchants
!Etchants
!Resists and polymers
!Resists and polymers
!Gases
!Precursors for ALD
!PCB chemicals
|-
|-
|[[:File:SU-8-developer-xgz3ef.pdf|SU-8]]
|[[:File:SU-8-developer-xgz3ef.pdf|SU-8]]
|[[:File:Silver-etchant-tfs-1bnaiao.pdf|Silver]]
|[[:File:Silver-etchant-tfs-1bnaiao.pdf|Silver]]
|[[:File:ZED-N50-1yto6n0.pdf|ZED N50]]
|[[:File:ZED-N50-1yto6n0.pdf|ZED N50]]
|[[:File:Chlorine Gas SDS.pdf|Chlorine]]
|[[:File:Orthrus from AirLiquide SDS ALAM.pdf|Orthrus]]
|[[:File:LPKF Dispense Solder Paste USA-en 1,0.pdf|LPKF Dispense Solder Paste]]
|-
|-
|[[:File:MF-321-developer-167b4iw.pdf|MF-321]]
|[[:File:MF-321-developer-167b4iw.pdf|MF-321]]
|[[:File:Nickel-Etchant-TFB-27lgd1d.pdf|Nickel]]
|[[:File:Nickel-Etchant-TFB-27lgd1d.pdf|Nickel]]
|[[:File:SU-82000-1jm0ei1.pdf|SU-82000]]
|[[:File:SU-82000-1jm0ei1.pdf|SU-82000]]
|
|[[:File:HfO2 precursor SDS.pdf|TDMAH]]
|[[:File:SDS LPKF Developer USA-en 1,0.pdf|LPKF Developer]]
|-
|-
|[[:File:MF-319-Developer-1iqbk7y.pdf|MF-319]]
|[[:File:MF-319-Developer-1iqbk7y.pdf|MF-319]]
|[[:File:Nano-Strip-MSDS-19b5vvy.pdf|Nano-Strip]]
|[[:File:Nano-Strip-MSDS-19b5vvy.pdf|Nano-Strip]]
|[[:File:S1813-2hn58rw.pdf|S1813]]
|[[:File:S1813-2hn58rw.pdf|S1813]]
|
|[[:File:Al2O3 precursor sd98-4003 US.pdf|TMA]]
|[[:File:SDS LPKF ProLegend Component A USA-en 1,0.pdf|LPKF ProLegend Component A]]
|-
|-
|[[:File:MF-312 Developer-snr8st.pdf|MF-312]]
|[[:File:MF-312 Developer-snr8st.pdf|MF-312]]
|[[:File:IRON-OXIDE-ETCHANT-1qxf0qq.pdf|Iron Oxide]]
|[[:File:IRON-OXIDE-ETCHANT-1qxf0qq.pdf|Iron Oxide]]
|[[:File:S1805-1ysp40e.pdf|S1805]]
|[[:File:S1805-1ysp40e.pdf|S1805]]
|
|[[:File:MgO precursor sd98-4010 US.pdf|Mg(EtCp)2]]
|[[:File:SDS LPKF ProLegend Component B USA-en 2,0.pdf|LPKF ProLegend Component B]]
|-
|-
|[[:File:AZ400K-Developer-2a5ha25.pdf|AZ 400K]]
|[[:File:AZ400K-Developer-2a5ha25.pdf|AZ 400K]]
|[[:File:Gold Etchant TFA MSDS-1vossr4.pdf|Gold]]
|[[:File:Gold Etchant TFA MSDS-1vossr4.pdf|Gold]]
|[[:File:Polyimide-2dw4nvf.pdf|Polyimide]]
|[[:File:Polyimide-2dw4nvf.pdf|Polyimide]]
|
|[[:File:Pt precursor sd78-1350 US.pdf|MeCpPtMe3]]
|[[:File:SDS LPKF ProMask Component A USA-en 1,0.pdf|LPKF ProMask Component A]]
|-
|-
|[[:File:AZ 300 MIF Developer MSDS-1mu55d5.pdf|AZ 300 MIF]]
|[[:File:AZ 300 MIF Developer MSDS-1mu55d5.pdf|AZ 300 MIF]]
|[[:File:Titanium-etchant-qz5tpa.pdf|Titanium]]
|[[:File:Titanium-etchant-qz5tpa.pdf|Titanium]]
|[[:File:PMMA-1l6wsvp.pdf|PMMA]]
|[[:File:PMMA-1l6wsvp.pdf|PMMA]]
|
|[[:File:Ru precursor sd98-4009 US.pdf|Diethylruthenocene]]
|[[:File:SDS LPKF ProMask Component B USA-en 2,0.pdf|LPKF ProMask Component B]]
|-
|-
|[[:File:AZ-KWIK-STRIP-REMOVER-2myuvsh.pdf|AZ KWIK STRIP REMOVER]]
|[[:File:AZ-KWIK-STRIP-REMOVER-2myuvsh.pdf|AZ KWIK STRIP REMOVER]]
|[[:File:CU-etch-2juc3ek.pdf|Copper]]
|[[:File:CU-etch-2juc3ek.pdf|Copper]]
|[[:File:AZ-5214-1n4ax5v.pdf|AZ-5214]]
|[[:File:AZ-5214-1n4ax5v.pdf|AZ-5214]]
|
|[[:File:TDMAT TiO2 precursor sd98-4015 US.pdf|TDMAT]]
|[[:File:SDS A4 LPKF Activator 310.pdf 2025-11-17 14-09-15.pdf|LPKF Activator 310]]
|-
|-
|[[:File:AZ-1500-Thinner-1l0gtmo.pdf|AZ 1500 thinner]]
|[[:File:AZ-1500-Thinner-1l0gtmo.pdf|AZ 1500 thinner]]
|[[:File:CR-7-1k5lh9c.pdf|CR-7]]
|[[:File:CR-7-1k5lh9c.pdf|CR-7]]
|
|
|
|[[:File:TDMAZ ZrO2 precursor sd98-4012 US.pdf|TDMAZ]]
|[[:File:SDS A4 LPKF Cleaner 110.pdf 2025-11-17 14-11-20.pdf|LPKF Cleaner 110]]
|-
|-
|[[:File:AZ-421K-Developer-1886tw4.pdf|AZ 421K]]
|[[:File:AZ-421K-Developer-1886tw4.pdf|AZ 421K]]
|[[:File:CHROMIUM-ETCH-2mw0yvf.pdf|Chromium]]
|[[:File:CHROMIUM-ETCH-2mw0yvf.pdf|Chromium]]
|
|
|
|[[:File:BDEAS SiO2 precursor sd98-8810 US.pdf|BDEAS]]
|[[:File:SDS A4 LPKF Cleaner 210.pdf 2025-11-17 14-11-30.pdf|LPKF Cleaner 210]]
|-
|-
|[[:File:XPSU-825-developer-1r38h98.pdf|XPSU-825]]
|[[:File:XPSU-825-developer-1r38h98.pdf|XPSU-825]]
|[[:File:BUFFERED-OXIDE-ETCH-20zagld.pdf|Buffered Oxide Etchant (BOE)]]
|[[:File:BUFFERED-OXIDE-ETCH-20zagld.pdf|Buffered Oxide Etchant (BOE)]]
|
|
|
|
|[[:File:SDS A4 LPKF Copper Plater 400.pdf 2025-11-17 14-12-20.pdf|LPKF Copper Plater 400]]
|-
|
|
|
|
|
|[[:File:SDS A4 LPKF Shine 410.pdf 2025-11-18 08-06-25.pdf|LPKF Shine 410]]
|}
|}


Latest revision as of 13:40, 15 July 2026

The USC Nanofab thanks you for your commitment to safety. By your situational awareness and attention to policy, our facility stays a safe place to work.

Administrative processes

Safety trainings

If you are an active user, you will have already completed both the General Lab Safety course with USC EHS as well as the Nanofab's Cleanroom safety training, as detailed in the New user onboarding procedure. This permits you cleanroom access and the ability to request tool trainings, which will have safety aspects built into the training content (e.g., Fumehood training). The training request form is linked from the wiki homepage and the NEMO homepage.

To maintain cleanroom access, all users must complete annual cleanroom-specific safety refresher training. This is sent out as an email invitation to all users with multiple sessions available.

Chemical approval

To get approval to bring in new chemicals into the cleanroom, submit a Chemical Approval Form, including the SDS, so that our staff and USC EHS are aware of it. When a chemical is completely used, alert staff to update the chemical inventory.

Standard Operating Procedures (SOPs)

Facility SOPs

Nanofab tool SOPs

For tool-specific SOPs, visit the Tool list and refer to the last column.

Chemical SOPs

The Nanofab provides below SOPs specific to our lab for working with specific hazardous materials. USC EHS also provides templates for chemical SOPs with more general guidance.

Safety Data Sheets (SDSs)

It's critical to know the hazards associated with the chemicals you handle. This can inform how you work with it, or whether you choose to use it at all. Additionally, regulating bodies require that SDSs are made available in the workplace. If you are handed an unfamiliar chemical, ask for the SDS.

SDSs for chemicals you can expect to find in the Nanofab

USC EHS has also pooled a list of SDS sources from chemical distributors.

Developers Etchants Resists and polymers Gases Precursors for ALD PCB chemicals
SU-8 Silver ZED N50 Chlorine Orthrus LPKF Dispense Solder Paste
MF-321 Nickel SU-82000 TDMAH LPKF Developer
MF-319 Nano-Strip S1813 TMA LPKF ProLegend Component A
MF-312 Iron Oxide S1805 Mg(EtCp)2 LPKF ProLegend Component B
AZ 400K Gold Polyimide MeCpPtMe3 LPKF ProMask Component A
AZ 300 MIF Titanium PMMA Diethylruthenocene LPKF ProMask Component B
AZ KWIK STRIP REMOVER Copper AZ-5214 TDMAT LPKF Activator 310
AZ 1500 thinner CR-7 TDMAZ LPKF Cleaner 110
AZ 421K Chromium BDEAS LPKF Cleaner 210
XPSU-825 Buffered Oxide Etchant (BOE) LPKF Copper Plater 400
LPKF Shine 410

Outside resources

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