Main Page: Difference between revisions

Latest revision as of 11:57, 6 February 2026

Welcome to the USC Nanofab Wiki! ✨
USC Nanofab Homepage

New user onboarding – Step-by-step guide to getting started
Directions to the USC Nanofab – Location, parking, and access info (Michelson Center basement)
Nanofab usage fees – Rates, billing
Contact Nanofab Staff - Nanofab staff responsibilities and contact info

NEMO - manage tool reservations and activate tools
Slack - Contact staff via Slack for operational matters, and get notified on issues and planned downtime with tools.
Tool training request form - You should receive an email CC'ing you and the tool trainer.
Tool list – Access SOPs for every tool
Safety resources – Facility and chemical SOPs and Safety Data Sheets

The O'Brien Nanofabrication Laboratory supports a wide range of micro/nano fabrication processes.

Process tools	Process recipes
Full Tool List Lithography Deposition Dry Etch Wet Processing Thermal Process Packaging/Bonding Metrology/Test PCB Processing	Dry Etching

Proudly supporting USC research in quantum, nano/bio, and beyond.

@@ Line 25: / Line 25: @@
 * [https://usc.qualtrics.com/jfe/form/SV_2ccy8prA0oRcZng Tool training request form] - You should receive an email CC'ing you and the tool trainer.
 * [[Tool list]] – Access SOPs for every tool
-* [[Safety resources]] – Ongoing safety compliance and references
+* [[Safety resources]] – Facility and chemical SOPs and Safety Data Sheets
 |}
 </div>
@@ Line 35: / Line 35: @@
 {| class="wikitable" style="width:100%;"
-! Equipment Info !! Recipes + Processes
+! Process tools !! Process recipes
 |-
 |
-* [[Tool list#Lithography|Lithography]]
+* [[Tool list|Full Tool List]]
-* [[Tool list#Deposition|Deposition]]
+** [[Tool list#Lithography|Lithography]]
-* [[Tool list#Dry Etching & Plasma Cleaning|Dry Etch]]
+** [[Tool list#Deposition|Deposition]]
-* [[Tool list#Wet process|Wet Processing]]
+** [[Tool list#Dry Etching & Plasma Cleaning|Dry Etch]]
-* [[Tool list#Anneal & Furnace|Thermal Process]]
+** [[Tool list#Wet process|Wet Processing]]
-* [[Tool list#Packaging & Mechanical Tooling|Packaging/Bonding]]
+** [[Tool list#Anneal & Furnace|Thermal Process]]
-* [[Tool list#Metrology|Metrology/Test]]
+** [[Tool list#Packaging & Mechanical Tooling|Packaging/Bonding]]
-* [[Tool list#PCB Processing|PCB Processing]]
+** [[Tool list#Metrology|Metrology/Test]]
+** [[Tool list#PCB Processing|PCB Processing]]
 |
 * [[Dry etching recipes|Dry Etching]]