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m Reverted edits by J (talk) to last revision by Chandanr
Tag: Rollback
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Welcome to the USC Nanofab Wiki! ✨
Welcome to the USC Nanofab Wiki! ✨<br>← Find what you need in the sidebar!
<br>
[https://nanofab.usc.edu/ USC Nanofab Homepage]
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<h2 style="background:#FFFFE0; color:#B22222; border:1px solid #B22222; padding:12px; margin:0 0 15px 0; border-radius:8px; font-weight:bold; text-align:center;">User Resources</h2>
 
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<h3 style="background:#FFFACD; color:#B22222; border:1px solid #B22222; padding:8px; margin:0 0 10px 0; border-radius:5px; font-weight:bold; text-align:center;">New Users</h3>
* [[New user onboarding]] – Step-by-step guide to getting started
* [[Directions to the USC Nanofab]] – Location, parking, and access info (Michelson Center basement)
* [[Nanofab usage fees]] – Rates, billing
* [[Contact Nanofab Staff]] - Nanofab staff responsibilities and contact info
 
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<h3 style="background:#FFFACD; color:#B22222; border:1px solid #B22222; padding:8px; margin:0 0 10px 0; border-radius:5px; font-weight:bold; text-align:center;">Current Users</h3>
* [https://nemo-usc.usc.edu/ NEMO] - manage tool reservations and activate tools
* [https://usc-nanofab.slack.com/ Slack] - Contact staff via Slack for operational matters, and get notified on issues and planned downtime with tools.
* [https://usc.qualtrics.com/jfe/form/SV_2ccy8prA0oRcZng Tool training request form] - You should receive an email CC'ing you and the tool trainer.
* [[Tool list]] – Access SOPs for every tool
* [[Safety resources]] – Facility and chemical SOPs and Safety Data Sheets
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<h2 style="background:#FFFFE0; color:#B22222; border:1px solid #B22222; padding:12px; margin:0 0 15px 0; border-radius:8px; font-weight:bold; text-align:center;">Nanofab Capabilities</h2>
 
The O'Brien Nanofabrication Laboratory supports a wide range of micro/nano fabrication processes.
 
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! Process tools !! Process recipes
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* [[Tool list|Full Tool List]]
** [[Tool list#Lithography|Lithography]]
** [[Tool list#Deposition|Deposition]]
** [[Tool list#Dry Etching & Plasma Cleaning|Dry Etch]]
** [[Tool list#Wet process|Wet Processing]]
** [[Tool list#Anneal & Furnace|Thermal Process]]
** [[Tool list#Packaging & Mechanical Tooling|Packaging/Bonding]]
** [[Tool list#Metrology|Metrology/Test]]
** [[Tool list#PCB Processing|PCB Processing]]
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* [[Dry etching recipes|Dry Etching]]
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Proudly supporting USC research in quantum, nano/bio, and beyond.
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Latest revision as of 15:58, 18 February 2026


Welcome to the USC Nanofab Wiki! ✨
← Find what you need in the sidebar!