|
|
| Line 1: |
Line 1: |
| __NOTOC__
| | #REDIRECT [[Dry etching recipes]] |
| | |
| === Process Group - Process Control Data ===
| |
| <small>''See the [[Process Group - Process Control Data#Etching (Process Control Data)|Process Control Data page]] for SPC charts (etch rate, uniformity, selectivity, etc. over time) for frequently used dry etch processes.''</small>
| |
| | |
| === Dry Etching Tools / Materials Table ===
| |
| | |
| ==== Process Maturity Ranking ====
| |
| * <code style="background:#FF0000; color:#000000; padding:2px 6px; border-radius:4px;">'''L1'''</code> — process has been run at least once
| |
| * <code style="background:#FF0000; color:#000000; padding:2px 6px; border-radius:4px;">'''L2'''</code> — process has been run and procedure is documented
| |
| * <code style="background:#FF0000; color:#000000; padding:2px 6px; border-radius:4px;">'''L3'''</code> — process has been run, procedure is documented, and data is available
| |
| * <code style="background:#FFFF00; color:#000000; padding:2px 6px; border-radius:4px;">'''L4'''</code> — documented procedure with regular (≥4× per year) data, no in-situ control
| |
| * <code style="background:#FFFF00; color:#000000; padding:2px 6px; border-radius:4px;">'''L5'''</code> — documented procedure with regular data and in-situ control available
| |
| * <code style="background:#FFFF00; color:#000000; padding:2px 6px; border-radius:4px;">'''L6'''</code> — fully controlled process with documented procedure and control charts/limits
| |
| * <code style="background:#EAECF0; color:#000000; padding:2px 6px; border-radius:4px;">'''A'''</code> — process allowed and materials available but never run
| |
| * <code style="background:#EAECF0; color:#000000; padding:2px 6px; border-radius:4px;">'''–'''</code> — process not allowed or not applicable
| |
| | |
| {| class="wikitable" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center; font-size: 95%" border="1"
| |
| |-
| |
| ! colspan="12" width="100%" height="45" |<div style="font-size: 150%;">Dry Etching Recipes</div>
| |
| |- bgcolor="#d0e7ff"
| |
| ! bgcolor="#eaecf0" |<!-- INTENTIONALLY LEFT BLANK -->
| |
| ! colspan="3" |'''[[RIE Etching Recipes|RIE Etching]]'''
| |
| ! colspan="4" |'''[[ICP Etching Recipes|ICP Etching]]'''
| |
| ! colspan="2" bgcolor="#d0e7ff" align="center" |'''[[Oxygen Plasma Recipes|Oxygen Plasma Systems]]'''
| |
| ! colspan="2" bgcolor="#d0e7ff" align="center" |'''[[Other Dry Etching Recipes|Other Dry Etchers]]'''
| |
| |- bgcolor="#d0e7ff"
| |
| ! bgcolor="#d0e7ff" align="center" |'''Material'''
| |
| | bgcolor="#daf1ff" |[[Dry Etching Recipes#Oxford RIE|Oxford RIE]]
| |
| | bgcolor="#daf1ff" |[[Dry Etching Recipes#Tegal Plasma|Tegal Plasma]] (not in op.)
| |
| | bgcolor="#daf1ff" |[[Dry Etching Recipes#Tegal O2 Plasma Asher|Tegal O2 Asher]]
| |
| | bgcolor="#daf1ff" |[[Dry Etching Recipes#Oxford DRIE|Oxford DRIE]]
| |
| | bgcolor="#daf1ff" |[[Dry Etching Recipes#Oxford DRIE-ALE|Oxford DRIE-ALE]] (comm.)
| |
| | bgcolor="#daf1ff" |[[Dry Etching Recipes#Oxford III-V|Oxford III-V]]
| |
| | bgcolor="#daf1ff" |[[Dry Etching Recipes#YES O2 Plasma|YES O2 Plasma]]
| |
| | bgcolor="#daf1ff" |[[Dry Etching Recipes#XeF2 etcher|XeF2 etcher]]
| |
| | bgcolor="#daf1ff" |[[Dry Etching Recipes#Other|Other]]
| |
| |- bgcolor="#eeffff"
| |
| ! bgcolor="#d0e7ff" align="center" |Ag
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |- bgcolor="#ffffff"
| |
| ! bgcolor="#d0e7ff" align="center" |Al
| |
| | <span style="background:#FFFF00; color:#000000; padding:2px 6px; border-radius:4px;">L4</span>
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |- bgcolor="#eeffff"
| |
| ! bgcolor="#d0e7ff" align="center" |Au
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |<span style="background:#FF0000; color:#000000; padding:2px 6px; border-radius:4px;">L3</span>
| |
| |- bgcolor="#ffffff"
| |
| ! bgcolor="#d0e7ff" align="center" |Cr
| |
| | <span style="background:#FFFF00; color:#000000; padding:2px 6px; border-radius:4px;">L4</span>
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |<span style="background:#FF0000; color:#000000; padding:2px 6px; border-radius:4px;">L1</span>
| |
| |- bgcolor="#eeffff"
| |
| ! bgcolor="#d0e7ff" align="center" |Cu
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |<span style="background:#FF0000; color:#000000; padding:2px 6px; border-radius:4px;">L1</span>
| |
| |- bgcolor="#ffffff"
| |
| ! bgcolor="#d0e7ff" align="center" |Ge
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |<span style="background:#FF0000; color:#000000; padding:2px 6px; border-radius:4px;">L1</span>
| |
| |- bgcolor="#eeffff"
| |
| ! bgcolor="#d0e7ff" align="center" |Mo
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |<span style="background:#FF0000; color:#000000; padding:2px 6px; border-radius:4px;">L1</span>
| |
| |- bgcolor="#ffffff"
| |
| ! bgcolor="#d0e7ff" align="center" |Ni
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |<span style="background:#FF0000; color:#000000; padding:2px 6px; border-radius:4px;">L3</span>
| |
| |- bgcolor="#eeffff"
| |
| ! bgcolor="#d0e7ff" align="center" |Pt
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |<span style="background:#FF0000; color:#000000; padding:2px 6px; border-radius:4px;">L3</span>
| |
| |- bgcolor="#ffffff"
| |
| ! bgcolor="#d0e7ff" align="center" |Ru
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |<span style="background:#FF0000; color:#000000; padding:2px 6px; border-radius:4px;">L1</span>
| |
| |- bgcolor="#eeffff"
| |
| ! bgcolor="#d0e7ff" align="center" |Si
| |
| | <span style="background:#FF0000; color:#000000; padding:2px 6px; border-radius:4px;">L3</span>
| |
| |
| |
| |<span style="background:#FF0000; color:#000000; padding:2px 6px; border-radius:4px;">L3</span>
| |
| |<span style="background:#FFFF00; color:#000000; padding:2px 6px; border-radius:4px;">L6</span>
| |
| |<span style="background:#FF0000; color:#000000; padding:2px 6px; border-radius:4px;">L1</span>
| |
| |<span style="background:#FF0000; color:#000000; padding:2px 6px; border-radius:4px;">L3</span>
| |
| |<span style="background:#FF0000; color:#000000; padding:2px 6px; border-radius:4px;">L3</span>
| |
| |<span style="background:#FF0000; color:#000000; padding:2px 6px; border-radius:4px;">L3</span>
| |
| |
| |
| |<span style="background:#FF0000; color:#000000; padding:2px 6px; border-radius:4px;">L1</span>
| |
| |- bgcolor="#ffffff"
| |
| ! bgcolor="#d0e7ff" align="center" |SiO₂
| |
| | <span style="background:#FF0000; color:#000000; padding:2px 6px; border-radius:4px;">L3</span>
| |
| |
| |
| |<span style="background:#FF0000; color:#000000; padding:2px 6px; border-radius:4px;">L3</span>
| |
| |<span style="background:#FFFF00; color:#000000; padding:2px 6px; border-radius:4px;">L6</span>
| |
| |<span style="background:#FF0000; color:#000000; padding:2px 6px; border-radius:4px;">L1</span>
| |
| |<span style="background:#FF0000; color:#000000; padding:2px 6px; border-radius:4px;">L3</span>
| |
| |<span style="background:#FF0000; color:#000000; padding:2px 6px; border-radius:4px;">L3</span>
| |
| |
| |
| |
| |
| |<span style="background:#FF0000; color:#000000; padding:2px 6px; border-radius:4px;">L1</span>
| |
| |- bgcolor="#eeffff"
| |
| ! bgcolor="#d0e7ff" align="center" |Si₃N₄
| |
| | <span style="background:#FF0000; color:#000000; padding:2px 6px; border-radius:4px;">L3</span>
| |
| |
| |
| |<span style="background:#FF0000; color:#000000; padding:2px 6px; border-radius:4px;">L3</span>
| |
| |<span style="background:#FFFF00; color:#000000; padding:2px 6px; border-radius:4px;">L6</span>
| |
| |<span style="background:#FF0000; color:#000000; padding:2px 6px; border-radius:4px;">L1</span>
| |
| |<span style="background:#FF0000; color:#000000; padding:2px 6px; border-radius:4px;">L3</span>
| |
| |<span style="background:#FF0000; color:#000000; padding:2px 6px; border-radius:4px;">L3</span>
| |
| |
| |
| |
| |
| |<span style="background:#FF0000; color:#000000; padding:2px 6px; border-radius:4px;">L1</span>
| |
| |- bgcolor="#ffffff"
| |
| ! bgcolor="#d0e7ff" align="center" |ITO
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |<span style="background:#FF0000; color:#000000; padding:2px 6px; border-radius:4px;">L1</span>
| |
| |- bgcolor="#eeffff"
| |
| ! bgcolor="#d0e7ff" align="center" |GaAs
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |<span style="background:#FFFF00; color:#000000; padding:2px 6px; border-radius:4px;">L6</span>
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |<span style="background:#FF0000; color:#000000; padding:2px 6px; border-radius:4px;">L1</span>
| |
| |- bgcolor="#ffffff"
| |
| ! bgcolor="#d0e7ff" align="center" |InP
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |<span style="background:#FFFF00; color:#000000; padding:2px 6px; border-radius:4px;">L6</span>
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |<span style="background:#FF0000; color:#000000; padding:2px 6px; border-radius:4px;">L1</span>
| |
| |- bgcolor="#eeffff"
| |
| ! bgcolor="#d0e7ff" align="center" |GaN
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |<span style="background:#FFFF00; color:#000000; padding:2px 6px; border-radius:4px;">L6</span>
| |
| |
| |
| |
| |
| |
| |
| |
| |
| |<span style="background:#FF0000; color:#000000; padding:2px 6px; border-radius:4px;">L1</span>
| |
| |- bgcolor="#ffffff"
| |
| ! bgcolor="#d0e7ff" align="center" |Photoresist & Organics
| |
| |<span style="background:#FF0000; color:#000000; padding:2px 6px; border-radius:4px;">L3</span>
| |
| |
| |
| |<span style="background:#FFFF00; color:#000000; padding:2px 6px; border-radius:4px;">L6</span>
| |
| |<span style="background:#FF0000; color:#000000; padding:2px 6px; border-radius:4px;">L3</span>
| |
| |<span style="background:#FF0000; color:#000000; padding:2px 6px; border-radius:4px;">L1</span>
| |
| |<span style="background:#FF0000; color:#000000; padding:2px 6px; border-radius:4px;">L3</span>
| |
| |<span style="background:#FFFF00; color:#000000; padding:2px 6px; border-radius:4px;">L6</span>
| |
| |<span style="background:#FF0000; color:#000000; padding:2px 6px; border-radius:4px;">L3</span>
| |
| |
| |
| |<span style="background:#FF0000; color:#000000; padding:2px 6px; border-radius:4px;">L1</span>
| |
| |- bgcolor="#eeffff"
| |
| ! bgcolor="#d0e7ff" align="center" |Material
| |
| | bgcolor="#daf1ff" |Oxford RIE
| |
| | bgcolor="#daf1ff" |Tegal Plasma (not in op.)
| |
| | bgcolor="#daf1ff" |Tegal O2 Asher
| |
| | bgcolor="#daf1ff" |Oxford DRIE
| |
| | bgcolor="#daf1ff" |Oxford DRIE-ALE (comm.)
| |
| | bgcolor="#daf1ff" |Oxford III-V
| |
| | bgcolor="#daf1ff" |YES O2 Plasma
| |
| | bgcolor="#daf1ff" |XeF2 etcher
| |
| | bgcolor="#daf1ff" |Other
| |
| |}
| |
| | |
| === Process Ranking Table ===
| |
| Processes in the table above are ranked by their "''Process Maturity Level''" as follows:
| |
| | |
| {| class="wikitable"
| |
| ! Level !! Color !! Description of Process Level Ranking
| |
| |-
| |
| | A || <code style="background:#EAECF0; color:#000000; padding:2px 6px; border-radius:4px;">A</code> || Process '''A'''llowed and materials available but never done
| |
| |-
| |
| | L1 || <code style="background:#FF0000; color:#000000; padding:2px 6px; border-radius:4px;">L1</code> || Process has been run at least once
| |
| |-
| |
| | L2 || <code style="background:#FF0000; color:#000000; padding:2px 6px; border-radius:4px;">L2</code> || Process has been run and procedure is documented
| |
| |-
| |
| | L3 || <code style="background:#FF0000; color:#000000; padding:2px 6px; border-radius:4px;">L3</code> || Process has been run, procedure is documented, and data is available
| |
| |-
| |
| | L4 || <code style="background:#FFFF00; color:#000000; padding:2px 6px; border-radius:4px;">L4</code> || Documented procedure with regular (≥4× per year) data, no in-situ control
| |
| |-
| |
| | L5 || <code style="background:#FFFF00; color:#000000; padding:2px 6px; border-radius:4px;">L5</code> || Documented procedure with regular data and in-situ control available
| |
| |-
| |
| | L6 || <code style="background:#FFFF00; color:#000000; padding:2px 6px; border-radius:4px;">L6</code> || Fully controlled process with documented procedure and control charts/limits available
| |
| |}
| |
| | |
| [[Category:Etching]]
| |
| [[Category:Process Control]]
| |