Main Page: Difference between revisions

Revision as of 08:50, 6 February 2026

Welcome to the USC Nanofab Wiki! ✨
USC Nanofab Homepage

New user onboarding – Step-by-step guide to getting started
Directions to the USC Nanofab – Location, parking, and access info (Michelson Center basement)
Nanofab usage fees – Rates, billing

NEMO - manage tool reservations and activate tools
Slack - Contact staff via Slack, and get notified on issues and planned downtime with tools.
Tool training request form - You should receive an email CC'ing you and the tool trainer.
Tool list – Access SOPs for every tool
Safety resources – Ongoing safety compliance and references

The O'Brien Nanofabrication Laboratory supports a wide range of micro/nano fabrication processes.

Equipment Info	Recipes + Processes	Data + Info	Other Links
Lithography Deposition Dry Etch Wet Processing Thermal Process Packaging/Bonding Metrology/Test PCB Processing	Dry Etching	Usage Fees Safety Resources Full Tool List + SOPs Process Control Data (add page if needed) Tutorials (add page if needed)	NEMO Slack Onboarding Directions + Parking Contact Nanofab Staff USC Nanofab Homepage

For more details, see the main site: Equipment Overview.

Proudly supporting USC research in quantum, nano/bio, and beyond.

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 * [[Dry etching recipes|Dry Etching]]
-* [[Tool list#Lithography|Lithography Processes]] (see SOPs)
-* [[Tool list#Deposition|Deposition Processes]] (see SOPs)
-* [[Tool list#Anneal & Furnace|Thermal Processes]] (see SOPs)
-* [[Tool list#Packaging & Mechanical Tooling|Packaging Processes]] (see SOPs)
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 * [[Nanofab usage fees|Usage Fees]]