Safety resources: Difference between revisions
→Safety Data Sheets (SDSs): Add more ALD precursors |
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|[[:File:Polyimide-2dw4nvf.pdf|Polyimide]] | |[[:File:Polyimide-2dw4nvf.pdf|Polyimide]] | ||
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| | |[[:File:Pt precursor sd78-1350 US.pdf|MeCpPtMe3]] | ||
|[[:File:SDS LPKF ProMask Component A USA-en 1,0.pdf|LPKF ProMask Component A]] | |[[:File:SDS LPKF ProMask Component A USA-en 1,0.pdf|LPKF ProMask Component A]] | ||
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|[[:File:PMMA-1l6wsvp.pdf|PMMA]] | |[[:File:PMMA-1l6wsvp.pdf|PMMA]] | ||
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| | |[[:File:Ru precursor sd98-4009 US.pdf|Diethylruthenocene]] | ||
|[[:File:SDS LPKF ProMask Component B USA-en 2,0.pdf|LPKF ProMask Component B]] | |[[:File:SDS LPKF ProMask Component B USA-en 2,0.pdf|LPKF ProMask Component B]] | ||
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|[[:File:AZ-5214-1n4ax5v.pdf|AZ-5214]] | |[[:File:AZ-5214-1n4ax5v.pdf|AZ-5214]] | ||
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| | |[[:File:TDMAT TiO2 precursor sd98-4015 US.pdf|TDMAT]] | ||
|[[:File:SDS A4 LPKF Activator 310.pdf 2025-11-17 14-09-15.pdf|LPKF Activator 310]] | |[[:File:SDS A4 LPKF Activator 310.pdf 2025-11-17 14-09-15.pdf|LPKF Activator 310]] | ||
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| | |[[:File:TDMAZ ZrO2 precursor sd98-4012 US.pdf|TDMAZ]] | ||
|[[:File:SDS A4 LPKF Cleaner 110.pdf 2025-11-17 14-11-20.pdf|LPKF Cleaner 110]] | |[[:File:SDS A4 LPKF Cleaner 110.pdf 2025-11-17 14-11-20.pdf|LPKF Cleaner 110]] | ||
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Revision as of 13:36, 15 July 2026
The USC Nanofab thanks you for your commitment to safety. By your situational awareness and attention to policy, our facility stays a safe place to work.
Administrative processes
Safety trainings
If you are an active user, you will have already completed both the General Lab Safety course with USC EHS as well as the Nanofab's Cleanroom safety training, as detailed in the New user onboarding procedure. This permits you cleanroom access and the ability to request tool trainings, which will have safety aspects built into the training content (e.g., Fumehood training). The training request form is linked from the wiki homepage and the NEMO homepage.
To maintain cleanroom access, all users must complete annual cleanroom-specific safety refresher training. This is sent out as an email invitation to all users with multiple sessions available.
Chemical approval
To get approval to bring in new chemicals into the cleanroom, submit a Chemical Approval Form, including the SDS, so that our staff and USC EHS are aware of it. When a chemical is completely used, alert staff to update the chemical inventory.
Standard Operating Procedures (SOPs)
Facility SOPs
Nanofab tool SOPs
For tool-specific SOPs, visit the Tool list and refer to the last column.
Chemical SOPs
The Nanofab provides below SOPs specific to our lab for working with specific hazardous materials. USC EHS also provides templates for chemical SOPs with more general guidance.
- Acute Toxicants SOP
- Carcinogens SOP
- Chlorinated Solvents SOP
- Corrosives SOP
- Cryogens SOP
- Explosives SOP
- Hydrofluoric Acid SOP
- Oxidants SOP
- Piranha & Nanostrip SOP
- Potassium Hydroxide SOP
- Reproductive Toxicants SOP
Safety Data Sheets (SDSs)
It's critical to know the hazards associated with the chemicals you handle. This can inform how you work with it, or whether you choose to use it at all. Additionally, regulating bodies require that SDSs are made available in the workplace. If you are handed an unfamiliar chemical, ask for the SDS.
SDSs for chemicals you can expect to find in the Nanofab
USC EHS has also pooled a list of SDS sources from chemical distributors.