Filmetrics F10 Standard Operating Procedure

Please note

This SOP is a rough draft and not to be executed.

Measuring film thickness

1. Open the Filmetrics software on the desktop.
2. Perform a baseline:
   1. Focus the camera on the calibration wafer:
      1. Place the square area labeled "focus region" of the Filmetrics-branded 4" calibration wafer under the optical head of the tool.
      2. Click on the live video tab
      3. Use the silver vertical focus knob to focus the video until the pattern is sharp.
   2. Click "baseline"
      1. When prompted, adjust the calibration wafer such that the square, not-patterned silicon region in the center of the wafer is under the optical head.
      2. When prompted, remove the calibration wafer and insert the sample to be measured.
         • If the sample is too small to sit flat on the center of the stage, place it on a carrier wafer.
         • Re-adjust focus onto the top surface

       For any measurement silicon based, can keep that baseline for all measurements

       If you don't get a "saturation error," then no baseline is needed

       Re-baseline every hour - software will remind you

   Move sample to the SiO2 on Si green circle