Filmetrics F10 Standard Operating Procedure

Measuring film thickness

1. Open the Filmetrics software on the desktop.
2. Perform a baseline:
   1. Focus the camera on the calibration wafer:
      1. Place the square area labeled "focus region" of the Filmetrics-branded 4" calibration wafer under the optical head of the tool.
      2. Click on the live video tab
      3. Use the silver vertical focus knob to focus the video until the pattern is sharp.
   2. Click "baseline"
      1. When prompted, adjust the calibration wafer such that the square, not-patterned silicon region in the center of the wafer is under the optical head.
      2. When prompted, remove the calibration wafer and insert the sample to be measured.
         • If the sample is too small to sit flat on the center of the stage, place it on a carrier wafer.
         • Re-adjust focus onto the top surface
      3. When prompted, insert the small 45-degree black reflector for the background measurement (this reflects light away from the return path)
         • No focus change is necessary.
3. Measure your sample:
   1. Switch to the Measure tab
   2. In the right-hand pane, select the appropriate recipe that describes your sample.
   3. Click the Measure button.
      • The software should report a thickness and a fit goodness.
      • If the fit goodness is less than 97%, question either your recipe selection or the sample.
      • Ctrl + M will enable continuous measurement, the same will disable it.