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Welcome to the USC Nanofab wiki!
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[https://nanofab.usc.edu/ Back to the main landing page at nanofab.usc.edu]
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Welcome to the USC Nanofab Wiki! ✨
<br>
[https://nanofab.usc.edu/ USC Nanofab Homepage]
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=== Nanofab capabilities ===
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== News & Announcements ==
{{news}} <!-- Or replace with {{Announcements}} / plain text updates -->


* [[Tool list]] - equipment specifications and standard operating procedures
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* [[Dry etching recipes]] - see previous etches done on Nanofab tools


=== New user resources ===
'''Stay informed:''' Check Slack for real-time tool downtime and emergencies.
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* [[New user onboarding]]
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* [[Directions to the USC Nanofab]]
== Quick Links ==
* [[Nanofab usage fees]]
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|-
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* [https://nemo-usc.usc.edu/ NEMO] – Tool access, scheduling, and reservations (USC VPN required off-campus)
* [https://usc-nanofab.slack.com/ Slack] – Chat with staff, get downtime alerts
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* [https://usc.qualtrics.com/jfe/form/SV_2ccy8prA0oRcZng Tool training request form] – Request training (expect email confirmation)
* [[Contact Nanofab Staff]] – Reach staff directly
* [[Safety resources]] – Policies, manuals, and guidelines
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=== Current user resources ===
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* [https://nemo-usc.usc.edu/ NEMO] - Tool access control and scheduling. A connection to the [https://itservices.usc.edu/vpn/ USC VPN] is required if not on campus.
== Nanofab Capabilities ==
* [https://usc-nanofab.slack.com/ Slack] - Communicate with staff, get notified of emergencies and tool downtime
The O'Brien Nanofabrication Laboratory supports a wide range of micro/nano fabrication processes.
* [https://usc.qualtrics.com/jfe/form/SV_2ccy8prA0oRcZng Tool training request form] - You should receive an email CC'ing you and the tool trainer.
 
* [[Safety resources]]
{| class="wikitable" style="width:100%;"
! Equipment Info !! Recipes + Processes !! Data + Info !! Other Links
|-
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* [[Tool list#Lithography|Lithography]]
* [[Tool list#Deposition|Deposition]]
* [[Tool list#Dry Etching & Plasma Cleaning|Dry Etch]]
* [[Tool list#Wet process|Wet Processing]]
* [[Tool list#Anneal & Furnace|Thermal Process]]
* [[Tool list#Packaging & Mechanical Tooling|Packaging/Bonding]]
* [[Tool list#Metrology|Metrology/Test]]
* [[Tool list#PCB Processing|PCB Processing]]
|
* [[Dry etching recipes|Dry Etching]]
* [[Tool list#Lithography|Lithography Processes]] (see SOPs)
* [[Tool list#Deposition|Deposition Processes]] (see SOPs)
* [[Tool list#Anneal & Furnace|Thermal Processes]] (see SOPs)
* [[Tool list#Packaging & Mechanical Tooling|Packaging Processes]] (see SOPs)
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* [[Nanofab usage fees|Usage Fees]]
* [[Safety resources|Safety Resources]]
* [[Tool list|Full Tool List + SOPs]]
* Process Control Data (add page if needed)
* Tutorials (add page if needed)
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* [https://nemo-usc.usc.edu/ NEMO]
* [https://usc-nanofab.slack.com/ Slack]
* [[New user onboarding|Onboarding]]
* [[Directions to the USC Nanofab|Directions + Parking]]
* [[Contact Nanofab Staff]]
* [[Contact Nanofab Staff]]
* [https://nanofab.usc.edu/ USC Nanofab Homepage]
|}
For more details, see the main site: [https://nanofab.usc.edu/equipment Equipment Overview].
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== User Resources ==
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=== New Users ===
* [[New user onboarding]] – Step-by-step guide to getting started
* [[Directions to the USC Nanofab]] – Location, parking, and access info (Michelson Center basement)
* [[Nanofab usage fees]] – Rates, billing, and account setup
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=== Current Users ===
* NEMO, Slack, and training requests (see Quick Links above)
* [[Tool list]] – Access SOPs for every tool
* [[Safety resources]] – Ongoing safety compliance and references
* Tool downtime notifications via Slack
|}
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== Additional Links ==
* [https://nanofab.usc.edu/ USC Nanofab Homepage] – Facility overview, research highlights, and news
* Research & Publications (add link if page created)
* Tech Talks or Seminars (add if applicable)
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Proudly supporting USC research in quantum, nano/bio, and beyond.
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Revision as of 14:30, 26 January 2026


Welcome to the USC Nanofab Wiki! ✨
USC Nanofab Homepage

News & Announcements


Stay informed: Check Slack for real-time tool downtime and emergencies.

  • NEMO – Tool access, scheduling, and reservations (USC VPN required off-campus)
  • Slack – Chat with staff, get downtime alerts

Nanofab Capabilities

The O'Brien Nanofabrication Laboratory supports a wide range of micro/nano fabrication processes.

Equipment Info Recipes + Processes Data + Info Other Links

For more details, see the main site: Equipment Overview.

User Resources

New Users

Current Users

  • NEMO, Slack, and training requests (see Quick Links above)
  • Tool list – Access SOPs for every tool
  • Safety resources – Ongoing safety compliance and references
  • Tool downtime notifications via Slack
  • USC Nanofab Homepage – Facility overview, research highlights, and news
  • Research & Publications (add link if page created)
  • Tech Talks or Seminars (add if applicable)

Proudly supporting USC research in quantum, nano/bio, and beyond.