Tool list

1. USC Nanofabrication Facility – Tool List

__Last extracted from provided equipment tables__

1. 1. Thermal Processing / Annealing

- RTA (Rapid Thermal Annealer) - Cascade Tek vacuum oven - Blue M furnace big - Blue M furnace little - Narco vacuum oven

1. 1. Deposition – CVD

- Oxford PECVD - Veeco ALD

1. 1. Deposition – PVD (Evaporation)

- Angstrom Evaporator - CHA Evaporator - KJL Evaporator - Temescal Metal e-beam evaporator *(not in service)*

1. 1. Deposition – PVD (Sputtering)

- KJL Sputter

1. 1. Dry Etching

- Oxford DRIE - Oxford DRIE-ALE - Oxford III-V - Oxford RIE - XeF₂ etcher

1. 1. Plasma Cleaning / Ashing

- Tegal O₂ Plasma Asher - Tegal Plasma *(not in operation)* - YES O₂ Plasma

1. 1. Lithography – Direct Write

- Raith EBL - Heidelberg DWL

1. 1. Lithography – Mask Aligners

- Aligner A (MJB3) - Aligner B (MJB3) - Aligner C (MJB4) - Aligner D (MA BA6 Gen4)

1. 1. Metrology

- 4-point Probe - Dektak profilometer - Ellipsometer - Filmetrics F20

1. 1. Microscopy

- Desktop SEM - Nikon LV 150 optical microscope - Max ERB optical microscope - Zeiss optical microscope - Nikon SMZ-10A optical microscope - Nikon optical microscope

1. 1. Packaging & Mechanical Processing

- Ball & Wedge bonder - Dicing Saw - Mini Polisher - LatticeAx Cleaver - FlipScribe Cleaver - Vacuum Bag Sealer

1. 1. PCB Processing

- LPKF PCB mill - LPKF electroplater *(not yet in use)*

1. 1. Wet Processing Fume Hoods
      1. Solvent Fume Hood

- Solvent fume hood

1. 1. 1. Acid Fume Hoods (Etch Bay)

- Acid fume hood left-side - Acid fume hood right-side

1. 1. 1. Resist & Developer Fume Hoods (Advanced Photo Bay)

- Resist fume hood - Base and developer fume hood left-side - Base and developer fume hood right-side

1. 1. 1. E-beam Resist Fume Hood (Photo Bay)

- E-beam resist fume hood