Process Control Data

Process Control Data are standardized test processes, run by the USC Nanofab, allowing day-to-day or year-by-year comparisons of tool performance at the process level. This is similar to Statistical Process Control (SPC). These links appear on individual tool pages under the Process Control section. TOC Data are collected by trained users, Process Engineers, or interns and reviewed by Nanofab Staff.

Deposition, Dielectric (Process Control Data)

SPC chart example

Example Process Control Charts (SPC) for thin-film calibrations.

screenshot of surfscan particle count

Example particle counts post-deposition on monitor wafers.

Screenshot of Filmetrics F50 wafermap of typical dielectric film

Example Thickness/Refractive Index uniformity map (target <4% variation).

Process control monitoring for dielectric deposition tools.

Oxford PECVD - Process Control

[Placeholder: Link to PECVD Plots of all data] [Placeholder: Link to PECVD SiO₂] [Placeholder: Link to PECVD Si₃N₄] [Placeholder: Link to PECVD SiON or other variants]

Veeco ALD - Process Control

[Placeholder: Link to ALD Plots of all data] [Placeholder: Link to ALD Al₂O₃] [Placeholder: Link to ALD HfO₂ / ZrO₂ / TiO₂] [Placeholder: Link to ALD High-k or metal oxides]

Other Deposition (Evaporation / Sputter) - Process Control

[Placeholder: Link to Metal/Dielectric Evap or Sputter Plots] [Placeholder: Link to SiO₂ or similar via PVD if available]

Old Data

Old-format data (pre-2023/2024) can be found here: [Placeholder: Link to Archived Deposition Data]

Deposition, Metal - Process Control Data

Process control for metal thin-film tools.

E-Beam / Thermal Evaporation - Process Control

Ti / Adhesion Layers

[Placeholder: Link to Titanium Datasheet] [Placeholder: Link to Titanium Plots]

Au

[Placeholder: Link to Gold Datasheet] [Placeholder: Link to Gold Plots]

Cr

[Placeholder: Link to Chromium Datasheet] [Placeholder: Link to Chromium Plots]

Other Metals (Pt, Ru, etc.)

[Placeholder: Link to Plots/Datasheet for ALD or Evap metals]

Sputter Deposition - Process Control

[Placeholder: Link to Sputter Metal Plots (e.g., Ti, Al, etc.)]

Etching (Process Control Data)

Process control for dry etching tools.

Oxford RIE / Plasma Etch - Process Control

SiO₂ / Si₃N₄ Etch

[Placeholder: Link to SiO₂ Etch Data (CHF₃/CF₄/Ar)] [Placeholder: Link to Plots]

Si Etch

[Placeholder: Link to Si Etch Data (SF₆-based)] [Placeholder: Link to Plots]

DRIE (Deep Reactive Ion Etch) - Process Control

Si Bosch Process

[Placeholder: Link to Si Bosch Etch Data (C₄F₈/SF₆/Ar)] [Placeholder: Link to Plots]

example of Process Control Charts

[Placeholder: Click for Process Control Charts]

III-V or Specialty Etch - Process Control

[Placeholder: Link to Cl₂/BCl₃-based Etch Data (e.g., GaAs/InP if supported)] [Placeholder: Link to Plots]

Lithography (Process Control Data)

Process control for patterning tools.

Raith EBPG E-Beam Lithography - Process Control

• Regular monitoring of dose repeatability, resolution, and overlay using test patterns.

[Placeholder: Link to Plots of CD Repeatability / Resolution] [Placeholder: Link to Data for Overlay and Particle Contamination]

Mask Aligner (MJB3 or Similar) - Process Control

• CD uniformity and alignment accuracy tracking.

[Placeholder: Link to CD Uniformity Data] [Placeholder: Link to Plots]

Example Data Table Placeholder: Example table with SEM measurements of features.

Example SPC Chart Placeholder: SPC chart for critical dimension vs. date.