Main Page

Welcome to the USC Nanofab Wiki! ✨
USC Nanofab Homepage

User Resources

New Users New user onboarding – Step-by-step guide to getting started Directions to the USC Nanofab – Location, parking, and access info (Michelson Center basement) Nanofab usage fees – Rates, billing

Current Users NEMO - manage tool reservations and activate tools Slack - Contact staff via Slack, and get notified on issues and planned downtime with tools. Tool training request form - You should receive an email CC'ing you and the tool trainer. Tool list – Access SOPs for every tool Safety resources – Ongoing safety compliance and references

Nanofab Capabilities

The O'Brien Nanofabrication Laboratory supports a wide range of micro/nano fabrication processes.

Equipment Info	Recipes + Processes	Data + Info	Other Links
Lithography Deposition Dry Etch Wet Processing Thermal Process Packaging/Bonding Metrology/Test PCB Processing	Dry Etching Lithography Processes (see SOPs) Deposition Processes (see SOPs) Thermal Processes (see SOPs) Packaging Processes (see SOPs)	Usage Fees Safety Resources Full Tool List + SOPs Process Control Data (add page if needed) Tutorials (add page if needed)	NEMO Slack Onboarding Directions + Parking Contact Nanofab Staff USC Nanofab Homepage

For more details, see the main site: Equipment Overview.

Additional Links

• USC Nanofab Homepage – Facility overview, research highlights, and news

Proudly supporting USC research in quantum, nano/bio, and beyond.