Desktop SEM
About
Process: This is a compact, tabletop scanning electron microscope (SEM) that provides high-resolution surface imaging and basic elemental analysis via energy-dispersive X-ray spectroscopy (EDS). It offers both electron and optical imaging modes, making it ideal for quick, user-friendly sample inspection without the complexity of full-size SEMs.
Hardware: Thermal field emission or high-brightness source for 5–15 kV acceleration voltage. Backscattered electron detector (BSED) for compositional contrast. Integrated EDS detector (ProX model) for elemental mapping/identification. Optical navigation camera for sample positioning. Vacuum system suitable for non-conductive samples with low-vacuum mode or minimal charging.
Key Features:
- Acceleration voltage: 5–15 kV
- Resolution: <10 nm (for BSED imaging)
- Magnification: 80× to 150,000×
- Imaging modes: Electron (SE/BSE) and optical
- Sample size: Up to 32 mm
- EDS: Basic elemental analysis and mapping (ProX model)
Applications:
- Surface morphology and topography of fabricated structures
- Inspection of nanostructures, nanowires, gratings, MEMS
- Failure analysis (defects, contamination, delamination)
- Cross-section or edge imaging of thin films/etch profiles
- Quick compositional contrast via BSE imaging
- Basic elemental identification (e.g., metal residues, particles)
Usage: Load sample (up to 32 mm), pump down chamber, navigate optically, select voltage/mode, focus, acquire images (SE/BSE), perform EDS if needed. Save images and spectra. Vent and unload.
Detailed Specifications
- Model: Phenom ProX G6 Desktop Scanning Electron Microscope
- Location: Metrology Bay
- Acceleration voltage: 5–15 kV
- Resolution: <10 nm (BSED)
- Magnification: 80× to 150,000×
- Detectors: Secondary electron (SE), backscattered electron (BSE), EDS (ProX)
- Imaging modes: Electron and optical
- Sample size: Up to 32 mm
- Features: Tabletop design, user-friendly interface, integrated EDS, low-vacuum compatibility
- Other: Fast, accessible SEM for routine imaging and basic analysis in cleanroom environment
Documentation
- SOP (legacy reference; confirm if updated for Phenom)
- Operation Manual
- Training required – contact lab staff (Chandan Ramakrishnaiah or Shivakumar Bhaskaran)
Recipes & Data
- Standard Imaging: Common settings include:
* Low voltage (5 kV): Surface-sensitive imaging, reduced charging * High voltage (10–15 kV): Deeper penetration, better resolution/BSE contrast * BSE mode: Compositional contrast for material differences * EDS: Point/spot or area scans for elemental ID (e.g., metal particles, contamination)
- Process Control: Calibrate focus/stigmation per sample. Use optical mode for quick navigation. Check charging on insulators (use low kV or conductive coating if needed).
- Notes: Samples >32 mm require cutting. Non-conductive samples may need carbon/gold coating (available in lab). EDS limited to basic qualitative analysis.
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