Heated ultrasonic bath
About
Process: This is a temperature-controlled ultrasonic bath used for solvent-based cleaning, cavitation-assisted particle removal, degassing of liquids, and dissolution of residues. Ultrasonic waves create microscopic bubbles that implode, dislodging contaminants from surfaces without mechanical abrasion.
Hardware: Heated tank with ultrasonic transducers (typically 40 kHz or similar frequency). Digital temperature controller for stable heating (ambient to ~80°C or higher – confirm on unit). Timer for controlled sonication cycles. Stainless steel or solvent-resistant tank. Located in the solvent fume hood for safe handling of organic solvents.
Key Features:
- Ultrasonic cleaning with cavitation
- Temperature control (heated bath)
- Solvent-compatible (use with acetone, IPA, etc.)
- Timer and power level adjustment
Applications:
- Removal of photoresist residues or organic contaminants
- Cleaning of wafers, masks, glassware, or tools after processing
- Degassing of solvents or adhesives before spin-coating
- Particle dislodgement from delicate structures
- Preparation of samples for further wet processing or inspection
Usage: Fill bath with appropriate solvent (e.g., IPA, acetone), set temperature and time, place sample(s) in beaker or basket (do not place directly in tank if reactive), start ultrasonic cycle, monitor process, rinse and dry samples after. Use fume hood ventilation. Never run dry.
Detailed Specifications
- Model: Not specified (standard heated ultrasonic bath)
- Location: Solvent Fume Hood – Metrology Bay
- Features: Ultrasonic cavitation, temperature-controlled heating, timer
- Temperature range: Ambient to ~80°C (confirm exact max on unit)
- Restrictions: Solvent-compatible only; avoid strong acids/bases in this bath (use acid hoods); do not run without liquid; avoid reactive or incompatible materials
- Other: Essential for solvent cleaning workflows in cleanroom
Documentation
- SOP – Solvent Fume Hoods (includes ultrasonic bath)
- Training required – contact lab staff (Chandan Ramakrishnaiah or Shivakumar Bhaskaran)
Recipes & Data
- Standard Cleaning: Common processes include:
* IPA ultrasonic clean: 40–60°C, 5–15 min (general degrease/particle removal) * Acetone + IPA sequence: 5 min each at 40°C (resist removal) * Degassing solvents: Room temp or low heat, 10–30 min (before spin-coating)
- Process Control: Visually inspect samples post-clean (microscope check for residues). Change solvent regularly to avoid recontamination. Use beaker-in-bath method for small volumes or hazardous solvents.
- Notes: Always use compatible containers (glass/PFA beakers). Do not exceed recommended temperature for solvent flash point. Rinse thoroughly with fresh solvent or DI water after cleaning.