Max ERB optical microscope
About
Process: This is a specialized optical microscope equipped with a high-quality Zeiss binocular head and integrated linear encoder for accurate dimensional measurements. It is used for detailed visual inspection, alignment verification, and basic metrology of fabricated structures in the cleanroom.
Hardware: Zeiss 47 30 12 9902 binocular microscope head for ergonomic viewing and high-resolution optics. MSA-001 linear encoder for precise position measurement (likely integrated for stage or focus tracking). Illumination system (brightfield assumed; confirm if darkfield/polarized). Manual stage for sample positioning. Suitable for wafer/piece inspection.
Key Features:
- Binocular head: Zeiss 47 30 12 9902 (high optical quality)
- Linear encoder: MSA-001 (for accurate distance/position readout)
- Magnification: Dependent on objectives (confirm available set, typically 5x–100x range)
- Applications focus: Visual inspection + basic dimensional metrology
Applications:
- Inspection of lithographic patterns, alignment marks, and defects
- Measurement of feature sizes, overlay, or critical dimensions (using encoder)
- Quality control after lithography, etch, or deposition
- Documentation of microstructures or process results
- Quick visual verification of small samples or test devices
Usage: Place sample on stage, adjust focus and illumination, view through binocular eyepieces, use linear encoder for measurements (e.g., distance between features), capture notes or photos if camera attached. Clean sample/stage after use.
Detailed Specifications
- Model: Max ERB (custom/legacy setup with Zeiss head)
- Location: Photo Bay
- Optics: Zeiss 47 30 12 9902 binocular microscope head
- Measurement: MSA-001 linear encoder for precise positioning/distance
- Features: Ergonomic binocular viewing, integrated metrology capability, cleanroom-compatible
- Restrictions: Limited to optical inspection (no SEM-level resolution); confirm objective set and illumination modes on tool
- Other: Specialized tool for combined visual inspection and basic linear measurements
Documentation
- Training required – contact lab staff (Chandan Ramakrishnaiah or Shivakumar Bhaskaran)
- Check lab resources for any existing quick guide or manual (no dedicated SOP file listed; consider creating one if needed)
Recipes & Data
- Standard Usage: Common tasks include:
* Feature size measurement: Use encoder to measure distances (e.g., line widths, spacings) * Alignment verification: Check overlay between layers visually or with encoder * Defect inspection: High-mag viewing for particles, scratches, or pattern errors
- Process Control: Record encoder readings for repeatability. Compare measurements with Dektak or SEM for validation.
- Notes: Clean lenses and stage regularly. Use appropriate lighting for contrast. Encoder calibration may be needed periodically.
Template:Under review This article was generated with assistance from a large language model (LLM) and is currently under human review and editing. Content may contain inaccuracies, unverified claims, or other issues. Please help improve it.