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Combined display of all available logs of USC Nanofab Wiki. You can narrow down the view by selecting a log type, the username (case-sensitive), or the affected page (also case-sensitive).
- 14:23, 22 April 2026 Chandanr talk contribs deleted page Widget:Iframe (content was: "<iframe src="<!--{$url|escape:'html'}-->" width="<!--{$width|escape:'html'|default:'481'}-->" height="<!--{$height|escape:'html'|default:'257'}-->" frameborder="0" scrolling="no" seamless></iframe>", and the only contributor was "Chandanr" (talk))
- 14:16, 22 April 2026 Chandanr talk contribs created page Widget:Iframe (Created page with "<iframe src="<!--{$url|escape:'html'}-->" width="<!--{$width|escape:'html'|default:'481'}-->" height="<!--{$height|escape:'html'|default:'257'}-->" frameborder="0" scrolling="no" seamless></iframe>")
- 09:59, 22 April 2026 Chandanr talk contribs deleted page Template:Etcher Comparison (content was: "<!-- Updated by: Chandan Ramakrishnaiah Role: Lab Operation Engineer (Staff) Phone: +1 (213) 551-6726 Email: chandanr@usc.edu --> {| class="wikitable" style="width:100%; border:3px solid #990000; background:#ffffff; text-align:left;" |- ! style="background:#990000; color:#FFCC00; padding:10px; border:2px solid #990000; min-width:120px;" | Feature ! style="background...", and the only contributor was "Chandanr" (talk))
- 16:45, 21 April 2026 Chandanr talk contribs created page Etcher Comparison (Created page with "<!-- Updated by: Chandan Ramakrishnaiah Role: Lab Operation Engineer (Staff) Phone: +1 (213) 551-6726 Email: chandanr@usc.edu --> {| class="wikitable" style="width:100%; border:3px solid #990000; background:#ffffff; text-align:left;" |- ! style="background:#990000; color:#FFCC00; padding:10px; border:2px solid #990000; min-width:120px;" | Feature ! style="background:#990000; color:#FFCC00; padding:10px; border:2px solid #990000;" | Oxford RIE ! sty...")
- 16:38, 21 April 2026 Chandanr talk contribs created page Template:Etcher Comparison (Created page with "<!-- Updated by: Chandan Ramakrishnaiah Role: Lab Operation Engineer (Staff) Phone: +1 (213) 551-6726 Email: chandanr@usc.edu --> {| class="wikitable" style="width:100%; border:3px solid #990000; background:#ffffff; text-align:left;" |- ! style="background:#990000; color:#FFCC00; padding:10px; border:2px solid #990000; min-width:120px;" | Feature ! style="background:#990000; color:#FFCC00; padding:10px; border:2px solid #990000;" | Oxford RIE ! sty...")
- 13:06, 13 April 2026 Chandanr talk contribs created page File:Laser Endpoint SOP apr 2026.pdf (Laser Endpoint SOP apr 2026)
- 13:06, 13 April 2026 Chandanr talk contribs uploaded File:Laser Endpoint SOP apr 2026.pdf (Laser Endpoint SOP apr 2026)
- 13:03, 13 April 2026 Chandanr talk contribs created page File:OES SOP apr 2026.pdf (OES SOP apr 2026)
- 13:03, 13 April 2026 Chandanr talk contribs uploaded File:OES SOP apr 2026.pdf (OES SOP apr 2026)
- 13:01, 13 April 2026 Chandanr talk contribs created page File:OES SOP.pdf (OES SOP Apr 2026)
- 13:01, 13 April 2026 Chandanr talk contribs uploaded File:OES SOP.pdf (OES SOP Apr 2026)
- 12:57, 13 April 2026 Chandanr talk contribs created page File:OXFDRIE80 SOP Updated 2026.pdf (Updated RIE80 SOP)
- 12:57, 13 April 2026 Chandanr talk contribs uploaded File:OXFDRIE80 SOP Updated 2026.pdf (Updated RIE80 SOP)
- 12:54, 13 April 2026 Chandanr talk contribs deleted page File:RIE 80 SOP - August 2023.pdf (Deleted old revision 20260413194506!RIE_80_SOP_-_August_2023.pdf: content before blanking was: "")
- 12:45, 13 April 2026 Chandanr talk contribs reverted File:RIE 80 SOP - August 2023.pdf to an old version (Reverted to version as of 11:42, 13 April 2026 (PDT))
- 12:43, 13 April 2026 Chandanr talk contribs uploaded a new version of File:RIE 80 SOP - August 2023.pdf
- 12:31, 13 April 2026 Chandanr talk contribs deleted page File:RIE 80 SOP - August 2023.pdf (Deleted old revision 20260413184229!RIE_80_SOP_-_August_2023.pdf: content before blanking was: "== Summary == Oxford RIE 80 SOP")
- 12:30, 13 April 2026 Chandanr talk contribs deleted page File:RIE 80 SOP - August 2023.pdf (Deleted old revision 20260413180735!RIE_80_SOP_-_August_2023.pdf: content before blanking was: "== Summary == Oxford RIE 80 SOP")
- 12:27, 13 April 2026 Chandanr talk contribs undeleted page File:RIE 80 SOP - August 2023.pdf (3 revisions and 3 files)
- 12:27, 13 April 2026 Chandanr talk contribs deleted page File:RIE 80 SOP - August 2023.pdf (content before blanking was: "== Summary == Oxford RIE 80 SOP")
- 12:24, 13 April 2026 Chandanr talk contribs undeleted page File:RIE 80 SOP - August 2023.pdf (3 revisions and 3 files)
- 12:23, 13 April 2026 Chandanr talk contribs deleted page File:RIE 80 SOP - August 2023.pdf (content was: "", and the only contributor was "Chandanr" (talk))
- 11:42, 13 April 2026 Chandanr talk contribs created page File:RIE 80 SOP - August 2023.pdf (updated.pdf)
- 11:42, 13 April 2026 Chandanr talk contribs uploaded File:RIE 80 SOP - August 2023.pdf (updated.pdf)
- 11:42, 13 April 2026 Chandanr talk contribs deleted page File:RIE 80 SOP - August 2023.pdf (content was: "== Summary == Oxford RIE 80 SOP")
- 11:30, 13 April 2026 Chandanr talk contribs created page MediaWiki:Licenses (Created blank page)
- 11:24, 13 April 2026 Chandanr talk contribs undeleted page File:RIE 80 SOP - August 2023.pdf (2 revisions and 2 files)
- 11:24, 13 April 2026 Chandanr talk contribs deleted page File:RIE 80 SOP - August 2023.pdf (content was: "== Summary == Oxford RIE 80 SOP")
- 11:23, 13 April 2026 Chandanr talk contribs undeleted page File:RIE 80 SOP - August 2023.pdf (2 revisions and 2 files)
- 11:22, 13 April 2026 Chandanr talk contribs deleted page File:RIE 80 SOP - August 2023.pdf (Duplicated file: content was: "== Summary == Oxford RIE 80 SOP")
- 11:10, 13 April 2026 Chandanr talk contribs undeleted page File:RIE 80 SOP - August 2023.pdf (2 revisions and 2 files)
- 11:08, 13 April 2026 Chandanr talk contribs deleted page File:RIE 80 SOP - August 2023.pdf (content was: "== Summary == Oxford RIE 80 SOP")
- 11:08, 13 April 2026 Chandanr talk contribs deleted page File:RIE 80 SOP - August 2023.pdf (Deleted old revision 20260413180735!RIE_80_SOP_-_August_2023.pdf: content was: "== Summary == Oxford RIE 80 SOP")
- 11:07, 13 April 2026 Chandanr talk contribs uploaded a new version of File:RIE 80 SOP - August 2023.pdf (RIE_80_SOP_August_2024.pdf)
- 13:44, 17 February 2026 Chandanr talk contribs created page File:Keithley-S530-parametric-test-system.jpg
- 13:44, 17 February 2026 Chandanr talk contribs uploaded File:Keithley-S530-parametric-test-system.jpg
- 13:38, 17 February 2026 Chandanr talk contribs created page File:Electroglas-4080X-wafer-loaded.jpg
- 13:38, 17 February 2026 Chandanr talk contribs uploaded File:Electroglas-4080X-wafer-loaded.jpg
- 13:37, 17 February 2026 Chandanr talk contribs created page File:Electroglas-4080X-chuck-detail.jpg
- 13:37, 17 February 2026 Chandanr talk contribs uploaded File:Electroglas-4080X-chuck-detail.jpg
- 13:35, 17 February 2026 Chandanr talk contribs created page File:Electroglas-4080X-full-view.jpg
- 13:35, 17 February 2026 Chandanr talk contribs uploaded File:Electroglas-4080X-full-view.jpg
- 12:06, 17 February 2026 Chandanr talk contribs created page Keithley S530 Parametric Test System (Created page with "== About == thumb|300px|Keithley S530 Parametric Test System (typical rack with SMUs, switching, and optional testhead/probe interface) '''Process:''' This is a semiconductor parametric test system for automated wafer/device electrical characterization, primarily DC I-V and C-V measurements. It integrates with probers (e.g., Electroglas 4080X) for PCM/TEG/production monitoring. '''Hardware:''' Keithley S530 (built around...")
- 11:58, 17 February 2026 Chandanr talk contribs created page Electroglas 4080X (Created page with "TOC == About == thumb|300px|Electroglas 4080X Automated Wafer Prober '''Process:''' This is an automated wafer prober used for wafer-level electrical testing preparation. It accurately places the wafer under a probe card, uses vision for alignment, and steps across die sites to enable a connected tester to perform electrical measurements and record/sort results. '''Hardware:''' Electroglas 4080X prober (modular: handler + probe...")
- 12:56, 10 February 2026 Chandanr talk contribs created page File:RTP-Technical-Manual.pdf
- 12:56, 10 February 2026 Chandanr talk contribs uploaded File:RTP-Technical-Manual.pdf
- 16:20, 5 February 2026 Chandanr talk contribs created page Process Control Data (Created page with "Process Control Data are standardized test processes, run by the USC Nanofab, allowing day-to-day or year-by-year comparisons of tool performance at the process level. This is similar to Statistical Process Control (SPC). These links appear on individual tool pages under the Process Control section. TOC Data are collected by trained users, Process Engineers, or interns and reviewed by Nanofab Staff. =Deposition, Dielectric (Process Control Data)= File:PECVD SPC Chart E...") Tag: Visual edit: Switched
- 21:37, 4 February 2026 Chandanr talk contribs created page Dry etching (Created page with "__NOTOC__ === Process Group - Process Control Data === <small>''See the Process Control Data page for SPC charts (etch rate, uniformity, selectivity, etc. over time) for frequently used dry etch processes.''</small> === Dry Etching Tools / Materials Table === ==== Process Maturity Ranking ==== * <code style="background:#FF0000; color:#000000; padding:2px 6px; border-radius:4px;">'''L1'''</code>...")
- 14:59, 4 February 2026 Chandanr talk contribs created page RIE 80 Standard Recipe Calibration (Created page with "https://docs.google.com/spreadsheets/d/1cleuEcpL6Nnjj40jUlnfaEt4aXEZ23ReL1UCT6eQsUY/edit?gid=873136343#gid=873136343")
- 17:15, 2 February 2026 Chandanr talk contribs created page Torrey Pines hot plate / stirrer (Created page with "__TOC__ == About == thumb|300px|Torrey Pines HS70 Hot Plate / Stirrer in E-beam Resist Fume Hood (Photo Bay) '''Process:''' This is a digital hot plate with integrated magnetic stirrer used for controlled heating and mixing of solutions in the e-beam resist workflow. It provides precise temperature regulation and stirring for consistent preparation of resists, developers, or other liquids before coating or processing. '''Hardware:''...")