Electroglas 4080X: Difference between revisions
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== About == | == About == | ||
[[File:Electroglas Horizon 4080X | [[File:Electroglas Horizon 4080X prober.jpg|thumb|300px|Electroglas Horizon 4080X Automated Wafer Prober (typical configuration with hot chuck and vision system)]] | ||
'''Process:''' | '''Process:''' This is an automated wafer prober used for precise wafer-level electrical testing preparation. It loads the wafer, performs vision-based alignment, and steps across die sites to make contact with a probe card, enabling the connected tester to perform measurements. | ||
'''Hardware:''' | '''Hardware:''' Electroglas 4080X prober (modular: handler + prober control + vision). Configured for 200 mm (8") wafers with hot chuck option. Includes DCM-2 (display/control), MHM (material handler), PCM (prober control), PRM-3 (vision). | ||
'''Key Features:''' | '''Key Features:''' | ||
Wafer | Wafer size: 100 mm (4″) – 200 mm (8″) standard; ring-carrier adapters up to 300 mm available | ||
Chuck type & temp.: Gold-plated vacuum chuck, ambient → +130 °C with TC-2000 controller (standard “hot chuck”) | |||
Indexing accuracy/repeatability: ±4 µm X-Y, Z-resolution 0.25 mil (6.3 µm) | |||
Throughput: ≤ 1.5 s die-to-die at 5 mm step; lot-level ≈ 60 wph (150 mm) | |||
Vision/alignment: PRM-3 CCD camera, Self-Teach Auto Alignment (STAA), optional OCR & Probe-Mark-Inspection (PMI) | |||
Interfaces: GPIB-IEEE 488, RS-232, Ethernet, EG-Commander/ProberBench software | |||
'''Applications:''' | '''Applications:''' | ||
Wafer loading, precise alignment, and stepping for parametric/TEG testing | |||
Wafer alignment and stepping for parametric testing | Integration with external testers (e.g., Keithley S530) for automated electrical characterization | ||
Temperature- | Temperature-controlled probing for device performance at elevated temps | ||
High-accuracy die-to-die positioning in production monitoring flows | |||
'''Usage:''' Load wafer via material handler, initiate alignment (STAA/vision), step to die sites, make probe contact. Controlled externally via interfaces (e.g., from tester software). Clean chuck/stage after use. | |||
'''Usage:''' Load wafer via handler, | |||
== Detailed Specifications == | == Detailed Specifications == | ||
Model: Electroglas 4080X Automated Wafer Prober | Model: Electroglas 4080X Automated Wafer Prober | ||
Location: [Specify lab bay | Location: [Specify lab bay if known, e.g., Test Bay] | ||
Restrictions: Mechanical handling/alignment only (no electrical | Wafer size: Up to 200 mm standard (adapters for larger) | ||
Other: Modular | Chuck: Hot chuck (up to +130 °C) | ||
Accuracy: ±4 µm X-Y indexing | |||
Vision: PRM-3 CCD with STAA | |||
Restrictions: Mechanical handling/alignment only (no electrical measurements); requires external tester | |||
Other: Modular design for cleanroom use; compatible with various probe cards | |||
== Documentation == | == Documentation == | ||
Training required – contact lab staff (Chandan Ramakrishnaiah or Shivakumar Bhaskaran) | Training required – contact lab staff (Chandan Ramakrishnaiah or Shivakumar Bhaskaran) | ||
Check lab resources for | Check lab resources for manuals (e.g., EG-Commander/ProberBench guides); no dedicated SOP listed – consider creating one | ||
== Recipes & Data == | == Recipes & Data == | ||
Standard Usage: Automated stepping for PCM/TEG lots; hot chuck for temp-dependent tests | |||
Standard Usage: | Process Control: Use consistent alignment routines; verify probe contact/scrub marks | ||
Notes: Interface with tester for full automation (GPIB/RS-232/Ethernet commands). Monitor chuck temp via TC-2000. | |||
Process Control: | |||
Notes: | |||
[[Template:Under review]] This article was generated with assistance from a large language model (LLM) and is currently under human review and editing. Content may contain inaccuracies, unverified claims, or other issues. Please help improve it. | [[Template:Under review]] This article was generated with assistance from a large language model (LLM) and is currently under human review and editing. Content may contain inaccuracies, unverified claims, or other issues. Please help improve it. | ||
Revision as of 12:01, 17 February 2026
TOC
About
Process: This is an automated wafer prober used for precise wafer-level electrical testing preparation. It loads the wafer, performs vision-based alignment, and steps across die sites to make contact with a probe card, enabling the connected tester to perform measurements. Hardware: Electroglas 4080X prober (modular: handler + prober control + vision). Configured for 200 mm (8") wafers with hot chuck option. Includes DCM-2 (display/control), MHM (material handler), PCM (prober control), PRM-3 (vision). Key Features:
Wafer size: 100 mm (4″) – 200 mm (8″) standard; ring-carrier adapters up to 300 mm available Chuck type & temp.: Gold-plated vacuum chuck, ambient → +130 °C with TC-2000 controller (standard “hot chuck”) Indexing accuracy/repeatability: ±4 µm X-Y, Z-resolution 0.25 mil (6.3 µm) Throughput: ≤ 1.5 s die-to-die at 5 mm step; lot-level ≈ 60 wph (150 mm) Vision/alignment: PRM-3 CCD camera, Self-Teach Auto Alignment (STAA), optional OCR & Probe-Mark-Inspection (PMI) Interfaces: GPIB-IEEE 488, RS-232, Ethernet, EG-Commander/ProberBench software Applications: Wafer loading, precise alignment, and stepping for parametric/TEG testing Integration with external testers (e.g., Keithley S530) for automated electrical characterization Temperature-controlled probing for device performance at elevated temps High-accuracy die-to-die positioning in production monitoring flows Usage: Load wafer via material handler, initiate alignment (STAA/vision), step to die sites, make probe contact. Controlled externally via interfaces (e.g., from tester software). Clean chuck/stage after use.
Detailed Specifications
Model: Electroglas 4080X Automated Wafer Prober Location: [Specify lab bay if known, e.g., Test Bay] Wafer size: Up to 200 mm standard (adapters for larger) Chuck: Hot chuck (up to +130 °C) Accuracy: ±4 µm X-Y indexing Vision: PRM-3 CCD with STAA Restrictions: Mechanical handling/alignment only (no electrical measurements); requires external tester Other: Modular design for cleanroom use; compatible with various probe cards
Documentation
Training required – contact lab staff (Chandan Ramakrishnaiah or Shivakumar Bhaskaran) Check lab resources for manuals (e.g., EG-Commander/ProberBench guides); no dedicated SOP listed – consider creating one
Recipes & Data
Standard Usage: Automated stepping for PCM/TEG lots; hot chuck for temp-dependent tests Process Control: Use consistent alignment routines; verify probe contact/scrub marks Notes: Interface with tester for full automation (GPIB/RS-232/Ethernet commands). Monitor chuck temp via TC-2000. Template:Under review This article was generated with assistance from a large language model (LLM) and is currently under human review and editing. Content may contain inaccuracies, unverified claims, or other issues. Please help improve it.