Tegal Plasma
About
Status: Not in Operation This Tegal Plasma 915 tool is currently offline and not available for user processing. It was previously used for plasma cleaning, ashing, or surface treatment, but has been decommissioned or is awaiting repair/reactivation.
Historical Process (for reference only): The Tegal Plasma 915 is a legacy RF plasma system typically used for oxygen or other gas plasma processes. It supported substrate cleaning, photoresist descum/ashing, surface activation, or gentle organic removal in a parallel-plate configuration.
Historical Hardware: - RF-powered plasma chamber (likely 13.56 MHz) - Substrate electrode for wafers/pieces - Gas delivery for O₂ or other plasmas - Basic pressure and power control
Historical Applications: - Plasma cleaning of substrates before deposition - Photoresist descum or partial ashing - Surface activation for improved adhesion - Gentle organic residue removal
Current Usage: The tool is **not in operation**. Do not attempt to use it. Refer to active plasma tools for similar processes: - Tegal O2 Plasma Asher (O₂ ashing and cleaning) - YES O2 Plasma (high-power O₂ plasma with heat) Contact lab staff for updates on potential reactivation or alternatives.
Detailed Specifications
- Model: Tegal Plasma 915
- Location: Advanced Photo Bay
- Status: Not in operation (as of latest wiki update)
- Other: Legacy system – limited current details available
- Restrictions: Unavailable for processing until further notice
Documentation
- No active SOP or quickstart available (tool offline)
- Training: Not applicable (tool not operational)
- Contact lab staff (Chandan Ramakrishnaiah or Shivakumar Bhaskaran) for status updates or alternative tools
Recipes & Data
- No active recipes or data (tool not in operation)
- Historical use likely included standard O₂ plasma cleaning/ashing processes
- For current plasma needs, refer to active tools: Tegal O2 Plasma Asher, YES O2 Plasma