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=== Tool Categories === | === Tool Categories === | ||
* | * Anneal & Furnace | ||
* | * Deposition | ||
* | * Dry Etching & Plasma Cleaning | ||
* | * Lithography | ||
* | * Metrology | ||
* | * Packaging & Mechanical Tooling | ||
* | * PCB Processing | ||
* | * Wet Process | ||
|} | |} | ||
=Anneal & Furnace= | = Anneal & Furnace = | ||
* | * Rapid Thermal Annealer (RTA) | ||
* Cascade Tek | * Cascade Tek Vacuum Oven | ||
* Blue M | * Blue M Furnace (Large) | ||
* Blue M | * Blue M Furnace (Small) | ||
* Narco | * Narco Vacuum Oven | ||
=Deposition= | = Deposition = | ||
== | == Chemical Vapor Deposition (CVD) == | ||
* Oxford PECVD | * Oxford PECVD | ||
* Veeco ALD | * Veeco ALD | ||
== | == Physical Vapor Deposition (PVD) == | ||
* Angstrom Evaporator | * Angstrom E-Beam Evaporator | ||
* CHA Evaporator | * CHA E-Beam Evaporator | ||
* KJL Evaporator | * KJL E-Beam Evaporator | ||
* Temescal | * Temescal E-Beam Evaporator (Not in service) | ||
* KJL Sputter | * KJL Sputter System | ||
=Dry Etching & Plasma Cleaning= | = Dry Etching & Plasma Cleaning = | ||
== | == Reactive Ion / Deep Reactive Ion Etchers == | ||
* Oxford DRIE | * Oxford DRIE (Deep Si Etcher) | ||
* Oxford DRIE-ALE | * Oxford DRIE-ALE (Atomic Layer Etcher – commissioning) | ||
* Oxford III-V | * Oxford III-V Etcher (PlasmaPro 100 Cobra) | ||
* Oxford RIE | * Oxford RIE (PlasmaPro 80 – Dielectrics) | ||
* | * XeF₂ Etcher | ||
== Plasma Cleaning / Ashing == | |||
* Tegal | * Tegal O₂ Plasma Asher | ||
* Tegal Plasma (Not in operation) | * Tegal Plasma Cleaner (Not in operation) | ||
* YES | * YES O₂ Plasma System | ||
=Lithography= | = Lithography = | ||
== | == Direct-Write / Maskless == | ||
* Raith | * Raith EBPG5150 Electron Beam Lithography | ||
* Heidelberg DWL | * Heidelberg DWL 66+ Direct Write Laser | ||
== | == Contact / Proximity Mask Aligners == | ||
* Aligner A ( | * Aligner A – SUSS MJB3 (Advanced Photo Bay) | ||
* Aligner B ( | * Aligner B – SUSS MJB3 (Photo Bay) | ||
* Aligner C ( | * Aligner C – SUSS MJB4 (Photo Bay) | ||
* Aligner D | * Aligner D – SUSS MA/BA6 Gen4 (Advanced Photo Bay) | ||
=Metrology= | = Metrology = | ||
== | == Thin-Film & Electrical == | ||
* 4- | * 4-Point Probe | ||
* | * DektakXT Profilometer | ||
* Ellipsometer | * Ellipsometer | ||
* Filmetrics F20 | * Filmetrics F20 Thin-Film Analyzer | ||
== | == Microscopy == | ||
* Desktop SEM | * Phenom ProX Desktop SEM | ||
* Nikon | * Nikon LV150 Optical Microscope | ||
* Max ERB | * Max ERB Optical Microscope | ||
* Zeiss | * Zeiss Optical Microscope | ||
* Nikon SMZ-10A | * Nikon SMZ-10A Stereo Microscope | ||
* Nikon | * Nikon Optical Microscope (unspecified model) | ||
=Packaging & Mechanical Tooling | = Packaging & Mechanical Tooling = | ||
* F&S Bondtec Ball & Wedge Wire Bonder | |||
* Ball & Wedge | * DISCO DAD3350 Dicing Saw | ||
* Dicing Saw | * EQ Unipol-300 Mini Polisher / Grinder | ||
* Mini Polisher | * LatticeAx 420 Cleaving System | ||
* LatticeAx | * LatticeGear FlipScribe Wafer Cleaver | ||
* FlipScribe Cleaver | * Gramatech Vacuum Bag Sealer | ||
* Vacuum Bag Sealer | |||
=PCB Processing= | = PCB Processing = | ||
* LPKF PCB | * LPKF ProtoMat S103 PCB Mill | ||
* LPKF | * LPKF Contac S4 Electroplater | ||
=Wet Process= | = Wet Process = | ||
== Solvent Fume Hood (Metrology Bay) == | |||
* Heated | * Heated Ultrasonic Bath | ||
* Torrey Pines | * Torrey Pines Hot Plate | ||
* Solvent | * Solvent Drains | ||
* | * N₂ Blow Guns | ||
== Acid Fume Hood – Left Side (Etch Bay) == | |||
* Heated | * Imtec Heated Bath | ||
* Quick- | * Quick-Dump-Rinse (QDR) Tank | ||
* DI | * DI Water Tap | ||
* | * N₂ Gun | ||
== Acid Fume Hood – Right Side (Etch Bay) == | |||
* Heated | * Imtec Heated Bath | ||
* Torrey Pines | * Torrey Pines Hot Plate (Left) | ||
* Torrey Pines | * Torrey Pines Hot Plate (Right) | ||
* Quick- | * Quick-Dump-Rinse (QDR) Tank | ||
* DI | * DI Water Tap | ||
* | * N₂ Sprayer | ||
== Resist Coating / Baking Fume Hood (Advanced Photo Bay) == | |||
* Spinner | * Laurell Spinner – Left | ||
* Spinner | * Laurell Spinner – Right | ||
* Bake | * Apogee Bake Plate 1 | ||
* Bake | * Apogee Bake Plate 2 | ||
* Bake | * Apogee Bake Plate 3 | ||
* Bake | * Apogee Bake Plate 4 | ||
== | == Developer / Base Fume Hood – Left Side (Advanced Photo Bay) == | ||
* Heated | * Imtec Heated Bath | ||
* Torrey Pines | * Torrey Pines Hot Plate | ||
* Quick- | * Quick-Dump-Rinse (QDR) Tank | ||
* DI | * DI Water Tap | ||
* | * N₂ Sprayer | ||
== | == Developer / Base Fume Hood – Right Side (Advanced Photo Bay) == | ||
* Heated | * Imtec Heated Bath | ||
* Torrey Pines | * Torrey Pines Hot Plate | ||
* Quick- | * Quick-Dump-Rinse (QDR) Tank | ||
* DI | * DI Water Tap | ||
* | * N₂ Sprayer | ||
== E-Beam Resist Fume Hood (Photo Bay) == | |||
* Headway | * Headway Spinner – Left | ||
* Headway | * Headway Spinner – Right | ||
* Apogee | * Apogee Hot Plate – Left | ||
* Apogee | * Apogee Hot Plate – Right | ||
* Ultrasonic | * Ultrasonic Heated Bath | ||
* Torrey Pines | * Torrey Pines Hot Plate / Stirrer | ||
== Decommissioned Tools == | == Decommissioned Tools == | ||
( | (None currently listed) | ||
This version uses clearer hierarchy with headings/subheadings, consistent naming, grouped logically within sections, and removes redundancy while keeping the structure clean and easy to scan. | |||
Revision as of 13:19, 2 February 2026
Tool Categories
|
Anneal & Furnace
- Rapid Thermal Annealer (RTA)
- Cascade Tek Vacuum Oven
- Blue M Furnace (Large)
- Blue M Furnace (Small)
- Narco Vacuum Oven
Deposition
Chemical Vapor Deposition (CVD)
- Oxford PECVD
- Veeco ALD
Physical Vapor Deposition (PVD)
- Angstrom E-Beam Evaporator
- CHA E-Beam Evaporator
- KJL E-Beam Evaporator
- Temescal E-Beam Evaporator (Not in service)
- KJL Sputter System
Dry Etching & Plasma Cleaning
Reactive Ion / Deep Reactive Ion Etchers
- Oxford DRIE (Deep Si Etcher)
- Oxford DRIE-ALE (Atomic Layer Etcher – commissioning)
- Oxford III-V Etcher (PlasmaPro 100 Cobra)
- Oxford RIE (PlasmaPro 80 – Dielectrics)
- XeF₂ Etcher
Plasma Cleaning / Ashing
- Tegal O₂ Plasma Asher
- Tegal Plasma Cleaner (Not in operation)
- YES O₂ Plasma System
Lithography
Direct-Write / Maskless
- Raith EBPG5150 Electron Beam Lithography
- Heidelberg DWL 66+ Direct Write Laser
Contact / Proximity Mask Aligners
- Aligner A – SUSS MJB3 (Advanced Photo Bay)
- Aligner B – SUSS MJB3 (Photo Bay)
- Aligner C – SUSS MJB4 (Photo Bay)
- Aligner D – SUSS MA/BA6 Gen4 (Advanced Photo Bay)
Metrology
Thin-Film & Electrical
- 4-Point Probe
- DektakXT Profilometer
- Ellipsometer
- Filmetrics F20 Thin-Film Analyzer
Microscopy
- Phenom ProX Desktop SEM
- Nikon LV150 Optical Microscope
- Max ERB Optical Microscope
- Zeiss Optical Microscope
- Nikon SMZ-10A Stereo Microscope
- Nikon Optical Microscope (unspecified model)
Packaging & Mechanical Tooling
- F&S Bondtec Ball & Wedge Wire Bonder
- DISCO DAD3350 Dicing Saw
- EQ Unipol-300 Mini Polisher / Grinder
- LatticeAx 420 Cleaving System
- LatticeGear FlipScribe Wafer Cleaver
- Gramatech Vacuum Bag Sealer
PCB Processing
- LPKF ProtoMat S103 PCB Mill
- LPKF Contac S4 Electroplater
Wet Process
Solvent Fume Hood (Metrology Bay)
- Heated Ultrasonic Bath
- Torrey Pines Hot Plate
- Solvent Drains
- N₂ Blow Guns
Acid Fume Hood – Left Side (Etch Bay)
- Imtec Heated Bath
- Quick-Dump-Rinse (QDR) Tank
- DI Water Tap
- N₂ Gun
Acid Fume Hood – Right Side (Etch Bay)
- Imtec Heated Bath
- Torrey Pines Hot Plate (Left)
- Torrey Pines Hot Plate (Right)
- Quick-Dump-Rinse (QDR) Tank
- DI Water Tap
- N₂ Sprayer
Resist Coating / Baking Fume Hood (Advanced Photo Bay)
- Laurell Spinner – Left
- Laurell Spinner – Right
- Apogee Bake Plate 1
- Apogee Bake Plate 2
- Apogee Bake Plate 3
- Apogee Bake Plate 4
Developer / Base Fume Hood – Left Side (Advanced Photo Bay)
- Imtec Heated Bath
- Torrey Pines Hot Plate
- Quick-Dump-Rinse (QDR) Tank
- DI Water Tap
- N₂ Sprayer
Developer / Base Fume Hood – Right Side (Advanced Photo Bay)
- Imtec Heated Bath
- Torrey Pines Hot Plate
- Quick-Dump-Rinse (QDR) Tank
- DI Water Tap
- N₂ Sprayer
E-Beam Resist Fume Hood (Photo Bay)
- Headway Spinner – Left
- Headway Spinner – Right
- Apogee Hot Plate – Left
- Apogee Hot Plate – Right
- Ultrasonic Heated Bath
- Torrey Pines Hot Plate / Stirrer
Decommissioned Tools
(None currently listed)
This version uses clearer hierarchy with headings/subheadings, consistent naming, grouped logically within sections, and removes redundancy while keeping the structure clean and easy to scan.