Tools menu

Tool Categories Anneal & Furnace Deposition Dry Etching & Plasma Cleaning Lithography Metrology and testing Packaging & Mechanical Tooling PCB Processing Wet Process

Anneal & Furnace

• RTA (Rapid Thermal Annealer)
• Cascade Tek vacuum oven
• Blue M furnace big
• Blue M furnace little
• Narco vacuum oven

Deposition

CVD (Chemical Vapor Deposition)

• Oxford PECVD
• Veeco ALD

PVD (Physical Vapor Deposition)

• Angstrom Evaporator
• CHA Evaporator
• KJL Evaporator
• Temescal Metal e-beam evaporator (Not in service)
• KJL Sputter

Dry Etching & Plasma Cleaning

Etchers

• Oxford DRIE
• Oxford DRIE-ALE (being commissioned)
• Oxford III-V
• Oxford RIE
• XeF2 etcher

Plasma Cleaning / Ashing

• Tegal O2 Plasma Asher
• Tegal Plasma (not in operation)
• YES O2 Plasma

Lithography

E-beam and Laser

• Raith EBL
• Heidelberg DWL

UV Mask Aligners

• Aligner A (MJB3)
• Aligner B (MJB3)
• Aligner C (MJB4)
• Aligner D (MA BA6 Gen4)

Metrology and testing

Assorted Metrology

• 4-point Probe
• Dektak profilometer
• Ellipsometer
• Filmetrics F20

Microscopes

• Desktop SEM
• Nikon LV 150 optical microscope
• Max ERB optical microscope
• Zeiss optical microscope
• Nikon SMZ-10A optical microscope
• Nikon optical microscope

Electrical Characterization

• Electroglas 4080X – Automated wafer prober
• Keithley S530 Parametric Test System – Parametric analyzer

Packaging & Mechanical Tooling

Wafer and Die Processing

• Ball & Wedge bonder
• Dicing Saw
• Mini Polisher
• LatticeAx Cleaver
• FlipScribe Cleaver
• Vacuum Bag Sealer

PCB Processing

• LPKF PCB mill
• LPKF electroplater

Wet Process

Fume Hoods & Stations

• Solvent Fume Hood (Metrology bay)
  • Heated ultrasonic bath (Solvent hood)
  • Torrey Pines hot plate (Solvent hood)
  • Solvent drains
  • N2 sprayers
• Acid Fume Hood – Left (Etch bay) – Piranha & Nanostrip allowed
  • Imtec Accubath (Acid left)
  • Quick-dump-rinse tank (QDR)
  • DI water tap
  • N2 gun
• Acid Fume Hood – Right (Etch bay) – No Piranha/Nanostrip
  • Imtec Accubath (Acid right)
  • Torrey Pines hot plate (Acid right – left & right units)
  • Quick-dump-rinse tank (QDR)
  • DI water tap
  • N2 sprayer
• Resist Fume Hood (Advanced Photo bay)
  • Laurell Spinner (left & right)
  • Apogee Bake Plate (1–4)
• Base & Developer Fume Hood – Left (Advanced Photo bay)
  • Imtec Accubath (Developer left)
  • Torrey Pines hot plate (Developer left)
  • Quick-dump-rinse tank (QDR)
  • DI water tap
  • N2 sprayer
• Base & Developer Fume Hood – Right (Advanced Photo bay)
  • Imtec Accubath (Developer right)
  • Torrey Pines hot plate (Developer right)
  • Quick-dump-rinse tank (QDR)
  • DI water tap
  • N2 sprayer
• E-beam Resist Fume Hood (Photo bay)
  • Headway Spinner (left & right)
  • Apogee Hot Plate (left & right – ebeam)
  • Ultrasonic heated bath
  • Torrey Pines hot plate / stirrer (ebeam hood)