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=== Tool Categories === | === Tool Categories === | ||
* Anneal & Furnace | * [[#Anneal & Furnace|Anneal & Furnace]] | ||
* Deposition | * [[#Deposition|Deposition]] | ||
* Dry Etching & Plasma Cleaning | * [[#Dry Etching & Plasma Cleaning|Dry Etching & Plasma Cleaning]] | ||
* Lithography | * [[#Lithography|Lithography]] | ||
* Metrology | * [[#Metrology|Metrology]] | ||
* Packaging & Mechanical Tooling | * [[#Packaging & Mechanical Tooling|Packaging & Mechanical Tooling]] | ||
* PCB Processing | * [[#PCB Processing|PCB Processing]] | ||
* Wet Process | * [[#Wet Process|Wet Process]] | ||
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(None currently listed) | (None currently listed) | ||
This | The top "Tool Categories" section now includes direct wiki-style links (using # anchors) that jump to each corresponding main section below when clicked in a wiki or compatible viewer. This makes navigation much easier and more organized. If this is rendered in a platform that supports anchor links, clicking a category will scroll directly to that tool group. | ||
Revision as of 13:20, 2 February 2026
Tool Categories |
Anneal & Furnace
- Rapid Thermal Annealer (RTA)
- Cascade Tek Vacuum Oven
- Blue M Furnace (Large)
- Blue M Furnace (Small)
- Narco Vacuum Oven
Deposition
Chemical Vapor Deposition (CVD)
- Oxford PECVD
- Veeco ALD
Physical Vapor Deposition (PVD)
- Angstrom E-Beam Evaporator
- CHA E-Beam Evaporator
- KJL E-Beam Evaporator
- Temescal E-Beam Evaporator (Not in service)
- KJL Sputter System
Dry Etching & Plasma Cleaning
Reactive Ion / Deep Reactive Ion Etchers
- Oxford DRIE (Deep Si Etcher)
- Oxford DRIE-ALE (Atomic Layer Etcher – commissioning)
- Oxford III-V Etcher (PlasmaPro 100 Cobra)
- Oxford RIE (PlasmaPro 80 – Dielectrics)
- XeF₂ Etcher
Plasma Cleaning / Ashing
- Tegal O₂ Plasma Asher
- Tegal Plasma Cleaner (Not in operation)
- YES O₂ Plasma System
Lithography
Direct-Write / Maskless
- Raith EBPG5150 Electron Beam Lithography
- Heidelberg DWL 66+ Direct Write Laser
Contact / Proximity Mask Aligners
- Aligner A – SUSS MJB3 (Advanced Photo Bay)
- Aligner B – SUSS MJB3 (Photo Bay)
- Aligner C – SUSS MJB4 (Photo Bay)
- Aligner D – SUSS MA/BA6 Gen4 (Advanced Photo Bay)
Metrology
Thin-Film & Electrical
- 4-Point Probe
- DektakXT Profilometer
- Ellipsometer
- Filmetrics F20 Thin-Film Analyzer
Microscopy
- Phenom ProX Desktop SEM
- Nikon LV150 Optical Microscope
- Max ERB Optical Microscope
- Zeiss Optical Microscope
- Nikon SMZ-10A Stereo Microscope
- Nikon Optical Microscope (unspecified model)
Packaging & Mechanical Tooling
- F&S Bondtec Ball & Wedge Wire Bonder
- DISCO DAD3350 Dicing Saw
- EQ Unipol-300 Mini Polisher / Grinder
- LatticeAx 420 Cleaving System
- LatticeGear FlipScribe Wafer Cleaver
- Gramatech Vacuum Bag Sealer
PCB Processing
- LPKF ProtoMat S103 PCB Mill
- LPKF Contac S4 Electroplater
Wet Process
Solvent Fume Hood (Metrology Bay)
- Heated Ultrasonic Bath
- Torrey Pines Hot Plate
- Solvent Drains
- N₂ Blow Guns
Acid Fume Hood – Left Side (Etch Bay)
- Imtec Heated Bath
- Quick-Dump-Rinse (QDR) Tank
- DI Water Tap
- N₂ Gun
Acid Fume Hood – Right Side (Etch Bay)
- Imtec Heated Bath
- Torrey Pines Hot Plate (Left)
- Torrey Pines Hot Plate (Right)
- Quick-Dump-Rinse (QDR) Tank
- DI Water Tap
- N₂ Sprayer
Resist Coating / Baking Fume Hood (Advanced Photo Bay)
- Laurell Spinner – Left
- Laurell Spinner – Right
- Apogee Bake Plate 1
- Apogee Bake Plate 2
- Apogee Bake Plate 3
- Apogee Bake Plate 4
Developer / Base Fume Hood – Left Side (Advanced Photo Bay)
- Imtec Heated Bath
- Torrey Pines Hot Plate
- Quick-Dump-Rinse (QDR) Tank
- DI Water Tap
- N₂ Sprayer
Developer / Base Fume Hood – Right Side (Advanced Photo Bay)
- Imtec Heated Bath
- Torrey Pines Hot Plate
- Quick-Dump-Rinse (QDR) Tank
- DI Water Tap
- N₂ Sprayer
E-Beam Resist Fume Hood (Photo Bay)
- Headway Spinner – Left
- Headway Spinner – Right
- Apogee Hot Plate – Left
- Apogee Hot Plate – Right
- Ultrasonic Heated Bath
- Torrey Pines Hot Plate / Stirrer
Decommissioned Tools
(None currently listed)
The top "Tool Categories" section now includes direct wiki-style links (using # anchors) that jump to each corresponding main section below when clicked in a wiki or compatible viewer. This makes navigation much easier and more organized. If this is rendered in a platform that supports anchor links, clicking a category will scroll directly to that tool group.