Tools menu
Tool Categories |
Anneal & Furnace
- RTA (Rapid Thermal Annealer)
- Cascade Tek vacuum oven
- Blue M furnace big
- Blue M furnace little
- Narco vacuum oven
Deposition
CVD (chemical vapor deposition)
- Oxford PECVD
- Veeco ALD
PVD (physical vapor deposition)
- Angstrom Evaporator
- CHA Evaporator
- KJL Evaporator
- Temescal Metal e-beam evaporator (Not in service)
- KJL Sputter
Dry Etching & Plasma Cleaning
Etchers
- Oxford DRIE
- Oxford DRIE-ALE
- Oxford III-V
- Oxford RIE
- XeF2 etcher
Plasma cleaning / ashing
- Tegal O2 Plasma Asher
- Tegal Plasma (Not in operation)
- YES O2 Plasma
Lithography
E-beam and laser
- Raith EBL
- Heidelberg DWL
UV mask aligners
- Aligner A (MJB3)
- Aligner B (MJB3)
- Aligner C (MJB4)
- Aligner D (MA BA6 Gen4)
Metrology
Assorted metrology
- 4-point Probe
- Dektak profilometer
- Ellipsometer
- Filmetrics F20
Microscopes
- Desktop SEM
- Nikon LV 150 optical microscope
- Max ERB optical microscope
- Zeiss optical microscope
- Nikon SMZ-10A optical microscope
- Nikon optical microscope
Packaging & Mechanical Tooling
Wafer and die processing
- Ball & Wedge bonder
- Dicing Saw
- Mini Polisher
- LatticeAx Cleaver
- FlipScribe Cleaver
- Vacuum Bag Sealer
PCB Processing
- LPKF PCB mill
- LPKF electroplater
Wet Process
Solvent fume hood
- Heated ultrasonic bath
- Torrey Pines hot plate
- Solvent drains
- N2 sprayers
Acid fume hood left-side
- Heated bath
- Quick-dump-rinse tank (QDR)
- DI water tap
- N2 gun
Acid fume hood right-side
- Heated bath
- Torrey Pines hot plate left
- Torrey Pines hot plate right
- Quick-dump-rinse tank (QDR)
- DI water tap
- N2 sprayer
Resist fume hood
- Spinner left
- Spinner right
- Bake plate 1
- Bake plate 2
- Bake plate 3
- Bake plate 4
Base and developer fume hood left-side
- Heated bath
- Torrey Pines hot plate
- Quick-dump-rinse tank (QDR)
- DI water tap
- N2 sprayer
Base and developer fume hood right-side
- Heated bath
- Torrey Pines hot plate
- Quick-dump-rinse tank (QDR)
- DI water tap
- N2 sprayer
E-beam resist fume hood
- Headway spinner left
- Headway spinner right
- Apogee hot plate left
- Apogee hot plate right
- Ultrasonic heated bath
- Torrey Pines hot plate/stirrer
Decommissioned Tools
(If any exist, list here; currently none specified in the provided structure)