Tools menu
Tool Categories |
Anneal & Furnace
- RTA (Rapid Thermal Annealer)
- Cascade Tek vacuum oven
- Blue M furnace big
- Blue M furnace little
- Narco vacuum oven
Deposition
CVD
PVD
- Angstrom Evaporator
- CHA Evaporator
- KJL Evaporator
- Temescal Metal e-beam evaporator (not in service)
- KJL Sputter
Dry Etching & Plasma Cleaning
Etchers
- Oxford DRIE
- Oxford DRIE-ALE (commissioning in progress)
- Oxford III-V
- Oxford RIE
- XeF2 etcher
Plasma cleaning / ashing
- Tegal O2 Plasma Asher
- Tegal Plasma (not in operation)
- YES O2 Plasma
Lithography
E-beam and laser
UV mask aligners
Metrology
Assorted metrology
Microscopes
- Desktop SEM
- Nikon LV 150 optical microscope
- Max ERB optical microscope
- Zeiss optical microscope
- Nikon SMZ-10A optical microscope
- Nikon optical microscope
Packaging & Mechanical Tooling
Wafer and die processing
PCB Processing
Wet Process
Solvent fume hood (Metrology bay)
- Heated ultrasonic bath
- Torrey Pines hot plate / stirrer
- Solvent drains
- N2 sprayers
Acid fume hood left (Etch bay)
- Heated bath (Imtec Accubath)
- Quick-dump-rinse tank (QDR)
- DI water tap
- N2 gun
Acid fume hood right (Etch bay)
- Heated bath (Imtec Accubath)
- Torrey Pines hot plate left
- Torrey Pines hot plate right
- Quick-dump-rinse tank (QDR)
- DI water tap
- N2 sprayer
Resist fume hood (Advanced Photo bay)
- Spinner left (Laurell)
- Spinner right (Laurell)
- Bake plate 1 (Apogee)
- Bake plate 2 (Apogee)
- Bake plate 3 (Apogee)
- Bake plate 4 (Apogee)
Base and developer fume hoods (Advanced Photo bay)
- Heated bath (Imtec Accubath)
- Torrey Pines hot plate
- Quick-dump-rinse tank (QDR)
- DI water tap
- N2 sprayer
E-beam resist fume hood (Photo bay)
- Headway spinner left
- Headway spinner right
- Apogee hot plate left
- Apogee hot plate right
- Ultrasonic heated bath
- Torrey Pines hot plate / stirrer