Tool list
Annealing
| Tool | Description |
|---|---|
| RTA | Rapid Thermal Annealer |
Deposition
| Tool | Description |
|---|---|
| Veeco ALD | Atomic Layer Deposition |
| Oxford PECVD | Plasma-enhanced chemical vapor deposition |
| Tool | Description |
|---|---|
| Angstrom Evaporator | Angstrom Engineering e-beam evaporator |
| CHA Evaporator | CHA Industries e-beam evaporator |
| KJL Evaporator | Kurt J. Lesker e-beam evaporator |
| Temescal Metal | Temescal e-beam evaporator |
| KJL Sputter | Kurt J. Lesker sputterer |
Lithography
| Tool | Description |
|---|---|
| Raith | Raith e-beam lithography EBPG5150 |
| Tool | Description |
|---|---|
| Heidelberg | Heidelberg DWL 66+ Laser Writer |