Tool list: Difference between revisions
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!Description | !Description | ||
|- | |- | ||
|[[Raith]] | |[[Raith|Raith EBL]] | ||
|Raith e-beam lithography EBPG5150 | |Raith e-beam lithography EBPG5150 | ||
|} | |} | ||
| Line 56: | Line 56: | ||
!Description | !Description | ||
|- | |- | ||
|[[Heidelberg]] | |[[Heidelberg|Heidelberg DWL]] | ||
|Heidelberg DWL 66+ Laser | |Heidelberg DWL 66+ (Direct Write Laser) | ||
|} | |||
{| class="wikitable" | |||
|+Aligners | |||
!Tool | |||
!Description | |||
|- | |||
|[[Aligner A (MJB3)]] | |||
|MJB3 aligner | |||
|- | |||
|[[Aligner B (MJB3)]] | |||
|MJB3 aligner | |||
|- | |||
|[[Aligner C (MJB4)]] | |||
|MJB4 aligner | |||
|- | |||
|[[Aligner D (MA/BA)]] | |||
|MA/BA aligner | |||
|} | |||
{| class="wikitable" | |||
|+Plasma cleaning / ashing | |||
!Tool | |||
!Description | |||
|- | |||
|[[O2 Plasma Asher]] | |||
| | |||
|- | |||
|[[Tegal Plasma]] | |||
|Tegal 915 Plasma Strip | |||
|- | |||
|[[YES O2 Plasma]] | |||
|YES Engineering O2 Plasma | |||
|} | |} | ||
== Etching == | == Etching == | ||
{| class="wikitable" | |||
|+ | |||
!Tool | |||
!Description | |||
|- | |||
|[[Oxford DRIE]] | |||
|Oxford System 100 Deep reactive-ion etcher | |||
|- | |||
|[[Oxford DRIE2]] | |||
|Oxford System ? Deep reactive-ion etcher | |||
|- | |||
|[[Oxford III-V]] | |||
|Oxford PlasmaPro 100 Cobra III-V etcher | |||
|- | |||
|[[Oxford RIE]] | |||
|Oxford PlasmaPro 80 reactive ion etcher | |||
|- | |||
|[[XeF2 etcher]] | |||
|XeF2 etcher | |||
|} | |||
== Metrology == | == Metrology == | ||
{| class="wikitable" | |||
|+ | |||
!Tool | |||
!Description | |||
|- | |||
|[[4Pt Probe|4-point Probe]] | |||
|Signatone 4-point probe | |||
|- | |||
|[[Dektak]] | |||
|Bruker DektakXT profilometer | |||
|- | |||
|[[Desktop SEM]] | |||
|Phenom ProX G6 Desktop Scanning Electron Microscope | |||
|} | |||
== Oxidation == | == Oxidation == | ||
{| class="wikitable" | |||
!Tool | |||
!Description | |||
|- | |||
|[[Oxide (lower)]] | |||
| | |||
|- | |||
|[[Oxide (upper)]] | |||
| | |||
|} | |||
== Packaging == | == Packaging & Mechanical Tooling == | ||
{| class="wikitable" | |||
!Tool | |||
!Description | |||
|- | |||
|[[Ball & Wedge bonder]] | |||
|F&S Bondtec 53BDA Deep-access & Ball-Wedge bonder | |||
|- | |||
|[[Scribe Tool]] | |||
|LatticeAx 420 Cleaving System | |||
|- | |||
|[[Dicing Saw]] | |||
|DISCO Corp. DAD3350 Dicing Saw | |||
|- | |||
|[[Vacuum Sealer]] | |||
|Gramatech GVS2600R Vacuum Sealer | |||
|} | |||
== Testers == | == Testers == | ||
{| class="wikitable" | |||
!Tool | |||
!Description | |||
|- | |||
|[[Keithley S530]] | |||
|Keithley (Tektronix) S530 Parametric tester | |||
|} | |||
Revision as of 16:15, 7 February 2025
Annealing
| Tool | Description |
|---|---|
| RTA | Rapid Thermal Annealer |
Deposition
| Tool | Description |
|---|---|
| Veeco ALD | Atomic Layer Deposition |
| Oxford PECVD | Plasma-enhanced chemical vapor deposition |
| Tool | Description |
|---|---|
| Angstrom Evaporator | Angstrom Engineering e-beam evaporator |
| CHA Evaporator | CHA Industries e-beam evaporator |
| KJL Evaporator | Kurt J. Lesker e-beam evaporator |
| Temescal Metal | Temescal e-beam evaporator |
| KJL Sputter | Kurt J. Lesker sputterer |
Lithography
| Tool | Description |
|---|---|
| Raith EBL | Raith e-beam lithography EBPG5150 |
| Tool | Description |
|---|---|
| Heidelberg DWL | Heidelberg DWL 66+ (Direct Write Laser) |
| Tool | Description |
|---|---|
| Aligner A (MJB3) | MJB3 aligner |
| Aligner B (MJB3) | MJB3 aligner |
| Aligner C (MJB4) | MJB4 aligner |
| Aligner D (MA/BA) | MA/BA aligner |
| Tool | Description |
|---|---|
| O2 Plasma Asher | |
| Tegal Plasma | Tegal 915 Plasma Strip |
| YES O2 Plasma | YES Engineering O2 Plasma |
Etching
| Tool | Description |
|---|---|
| Oxford DRIE | Oxford System 100 Deep reactive-ion etcher |
| Oxford DRIE2 | Oxford System ? Deep reactive-ion etcher |
| Oxford III-V | Oxford PlasmaPro 100 Cobra III-V etcher |
| Oxford RIE | Oxford PlasmaPro 80 reactive ion etcher |
| XeF2 etcher | XeF2 etcher |
Metrology
| Tool | Description |
|---|---|
| 4-point Probe | Signatone 4-point probe |
| Dektak | Bruker DektakXT profilometer |
| Desktop SEM | Phenom ProX G6 Desktop Scanning Electron Microscope |
Oxidation
| Tool | Description |
|---|---|
| Oxide (lower) | |
| Oxide (upper) |
Packaging & Mechanical Tooling
| Tool | Description |
|---|---|
| Ball & Wedge bonder | F&S Bondtec 53BDA Deep-access & Ball-Wedge bonder |
| Scribe Tool | LatticeAx 420 Cleaving System |
| Dicing Saw | DISCO Corp. DAD3350 Dicing Saw |
| Vacuum Sealer | Gramatech GVS2600R Vacuum Sealer |
Testers
| Tool | Description |
|---|---|
| Keithley S530 | Keithley (Tektronix) S530 Parametric tester |