Tool list

Annealing

Tool	Description
RTA	Rapid Thermal Annealer

Deposition

CVD (chemical vapor deposition)

Tool	Description
Veeco ALD	Atomic Layer Deposition
Oxford PECVD	Plasma-enhanced chemical vapor deposition

PVD (physical vapor deposition)

Tool	Substrate size (up to diameter)	# of pockets	E-beam voltage	Deposition materials	Gases	Other features	Links
Angstrom Evaporator	6"	4	10kV	Ti, Al, Al2O3	Ar, 5% O2 in Ar	variable angle stage substrate rotation substrate heater ion mill for substrate cleaning load lock	SOP
CHA Evaporator	6"	6 @ 15cc	10kV	Ti, Au, Pt, Pd, Cr, Ni and Ag		Sweep controller motor-driven deposition shield 8kW heater array Lift-off fixturing substrate rotation substrate dome for twenty-two 100mm back loaded wafers Inficon IC/6 for thickness control	SOP
KJL Evaporator	6"	4	5kV	Ti, Au, Pt, Pd, Cr, Ni and Ag		substrate rotation source to substrate distance is approx. 15″ (381mm)	SOP, how-to video
Temescal Metal						Temescal e-beam evaporator
Tool	Substrate size	# of sources	Sputter power	Deposition materials	Gases	Other features	Links
KJL Sputter	6"	5 total, 4 DC, 1 RF/DC	DC sputter power 500 W RF sputter power 300 W	Au, Pt, Ti, Al, W, Mo, Cu, SiO2, Al2O3, ITO	Ar, O2	Target size: 2" Substrate rotation	SOP

Lithography

E-beam lithography

Tool	Description
Raith EBL	Raith e-beam lithography EBPG5150

Laser writing

Tool	Description
Heidelberg DWL	Heidelberg DWL 66+ (Direct Write Laser)

Aligners

Tool	Description
Aligners A and B (MJB3)	MJB3 aligner
Aligner C (MJB4)	MJB4 aligner
Aligner D (MA BA6 Gen4)	MA/BA aligner

Dry Etching

See also: Dry etch equipment comparison.

Etchers

Tool	Description
Oxford DRIE	Oxford System 100 Deep reactive-ion etcher
Oxford DRIE-ALE	Oxford Deep reactive-ion etcher and atomic-layer etcher.
Oxford III-V	Oxford PlasmaPro 100 Cobra III-V etcher
Oxford RIE	Oxford PlasmaPro 80 reactive ion etcher
XeF2 etcher	XeF2 etcher

Plasma cleaning / ashing

Tool	Description
O2 Plasma Asher
Tegal Plasma	Tegal 915 Plasma Strip
YES O2 Plasma	YES Engineering O2 Plasma

Metrology

Tool	Description
4-point Probe	Signatone 4-point probe
Dektak	Bruker DektakXT profilometer
Desktop SEM	Phenom ProX G6 Desktop Scanning Electron Microscope
Ellipsometer	Thin film thickness measurement
F20	Thin film thickness measurement
Keithley S530	Keithley (Tektronix) S530 Parametric tester

Oxidation

Tool	Description
Oxide (lower)
Oxide (upper)

Packaging & Mechanical Tooling

Tool	Description
Ball & Wedge bonder	F&S Bondtec 53BDA Deep-access & Ball-Wedge bonder
Dicing Saw	DISCO Corp. DAD3350 Dicing Saw
Mini Polisher	EQ Unipol-300 Mini (3") Automatic Grinder/ Polisher
Scribe Tool	LatticeAx 420 Cleaving System
Vacuum Sealer	Gramatech GVS2600R Vacuum Sealer

Wet Process

Solvent fume hood (in Metrology bay)

Tool	Description
Heated ultrasonic bath
Hot plate

Acid fume hood left-side (in Etch bay)

Tool	Description

Acid fume hood right-side (in Etch bay)

Tool	Description

Resist fume hood

Tool	Description
Spinner 1	Laurell resist spinner (left side)
Spinner 2	Laurell resist spinner (right side)
Bake plate 1	Apogee bake plate
Bake plate 2	Apogee bake plate
Bake plate 3	Apogee bake plate
Bake plate 4	Apogee bake plate

Base and developer fume hood left-side (in Advanced Photo bay)

Tool	Description

Base and developer fume hood right-side (in Advanced Photo bay)

Tool	Description

EBL-use-only fume hood (in Photo bay)

Tool	Description
Headway spinner left	Headway resist spinner
Headway spinner right	Headway resist spinner
Torrey Pines Hot Plate left
Torrey Pines Hot Plate right
Ultrasonic heated bath