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* [[#Dry Etching & Plasma Cleaning|Dry Etching & Plasma Cleaning]] | * [[#Dry Etching & Plasma Cleaning|Dry Etching & Plasma Cleaning]] | ||
* [[#Lithography|Lithography]] | * [[#Lithography|Lithography]] | ||
* [[#Metrology|Metrology]] | * [[#Metrology and testing|Metrology and testing]] | ||
* [[#Packaging & Mechanical Tooling|Packaging & Mechanical Tooling]] | * [[#Packaging & Mechanical Tooling|Packaging & Mechanical Tooling]] | ||
* [[#PCB Processing|PCB Processing]] | * [[#PCB Processing|PCB Processing]] | ||
Revision as of 17:53, 13 February 2026
Tool Categories |
Anneal & Furnace
- RTA (Rapid Thermal Annealer)
- Cascade Tek vacuum oven
- Blue M furnace big
- Blue M furnace little
- Narco vacuum oven
Deposition
CVD (Chemical Vapor Deposition)
PVD (Physical Vapor Deposition)
- Angstrom Evaporator
- CHA Evaporator
- KJL Evaporator
- Temescal Metal e-beam evaporator (Not in service)
- KJL Sputter
Dry Etching & Plasma Cleaning
Etchers
- Oxford DRIE
- Oxford DRIE-ALE (being commissioned)
- Oxford III-V
- Oxford RIE
- XeF2 etcher
Plasma Cleaning / Ashing
- Tegal O2 Plasma Asher
- Tegal Plasma (not in operation)
- YES O2 Plasma
Lithography
E-beam and Laser
UV Mask Aligners
Metrology and testing
Assorted Metrology
Microscopes
- Desktop SEM
- Nikon LV 150 optical microscope
- Max ERB optical microscope
- Zeiss optical microscope
- Nikon SMZ-10A optical microscope
- Nikon optical microscope
Packaging & Mechanical Tooling
Wafer and Die Processing
PCB Processing
Wet Process
Fume Hoods & Stations
- Solvent Fume Hood (Metrology bay)
- Heated ultrasonic bath (Solvent hood)
- Torrey Pines hot plate (Solvent hood)
- Solvent drains
- N2 sprayers
- Acid Fume Hood – Left (Etch bay) – Piranha & Nanostrip allowed
- Imtec Accubath (Acid left)
- Quick-dump-rinse tank (QDR)
- DI water tap
- N2 gun
- Acid Fume Hood – Right (Etch bay) – No Piranha/Nanostrip
- Imtec Accubath (Acid right)
- Torrey Pines hot plate (Acid right – left & right units)
- Quick-dump-rinse tank (QDR)
- DI water tap
- N2 sprayer
- Resist Fume Hood (Advanced Photo bay)
- Laurell Spinner (left & right)
- Apogee Bake Plate (1–4)
- Base & Developer Fume Hood – Left (Advanced Photo bay)
- Imtec Accubath (Developer left)
- Torrey Pines hot plate (Developer left)
- Quick-dump-rinse tank (QDR)
- DI water tap
- N2 sprayer
- Base & Developer Fume Hood – Right (Advanced Photo bay)
- Imtec Accubath (Developer right)
- Torrey Pines hot plate (Developer right)
- Quick-dump-rinse tank (QDR)
- DI water tap
- N2 sprayer
- E-beam Resist Fume Hood (Photo bay)
- Headway Spinner (left & right)
- Apogee Hot Plate (left & right – ebeam)
- Ultrasonic heated bath
- Torrey Pines hot plate / stirrer (ebeam hood)