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__NOTOC__ | __NOTOC__ | ||
{| class="wikitable" style="width:max-content;" | |||
| | |||
=== Tool Categories === | |||
* [[#Anneal & Furnace|Anneal & Furnace]] | |||
* [[#Deposition|Deposition]] | |||
* [[#Dry Etching & Plasma Cleaning|Dry Etching & Plasma Cleaning]] | |||
* [[#Lithography|Lithography]] | |||
* [[#Metrology and testing|Metrology and testing]] | |||
* [[#Packaging & Mechanical Tooling|Packaging & Mechanical Tooling]] | |||
* [[#PCB Processing|PCB Processing]] | |||
* [[#Wet Process|Wet Process]] | |||
|} | |||
== Anneal & Furnace == | |||
* [[RTA (Rapid Thermal Annealer__NOTOC__ | |||
{| class="wikitable" style="width:max-content;" | {| class="wikitable" style="width:max-content;" | ||
| | | | ||
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== Deposition == | == Deposition == | ||
=== CVD (Chemical Vapor Deposition) === | |||
* [[Oxford PECVD]] | |||
* [[Veeco ALD]] | |||
=== PVD (Physical Vapor Deposition) === | |||
* [[Angstrom Evaporator]] | |||
* [[CHA Evaporator]] | |||
* [[KJL Evaporator]] | |||
* [[Temescal Metal e-beam evaporator]] (Not in service) | |||
* [[KJL Sputter]] | |||
== Dry Etching & Plasma Cleaning == | |||
=== Etchers === | |||
* [[Oxford DRIE]] | |||
* [[Oxford DRIE-ALE]] (being commissioned) | |||
* [[Oxford III-V]] | |||
* [[Oxford RIE]] | |||
* [[XeF2 etcher]] | |||
=== Plasma Cleaning / Ashing === | |||
* [[Tegal O2 Plasma Asher]] | |||
* [[Tegal Plasma]] (not in operation) | |||
* [[YES O2 Plasma]] | |||
== Lithography == | |||
=== E-beam and Laser === | |||
* [[Raith EBL]] | |||
* [[Heidelberg DWL]] | |||
=== UV Mask Aligners === | |||
* [[Aligner A (MJB3)]] | |||
* [[Aligner B (MJB3)]] | |||
* [[Aligner C (MJB4)]] | |||
* [[Aligner D (MA BA6 Gen4)]] | |||
== Metrology and testing == | |||
=== Assorted Metrology === | |||
* [[4-point Probe]] | |||
* [[Dektak profilometer]] | |||
* [[Ellipsometer]] | |||
* [[Filmetrics F20]] | |||
=== Microscopes === | |||
* [[Desktop SEM]] | |||
* [[Nikon LV 150 optical microscope]] | |||
* [[Max ERB optical microscope]] | |||
* [[Zeiss optical microscope]] | |||
* [[Nikon SMZ-10A optical microscope]] | |||
* [[Nikon optical microscope]] | |||
=== Electrical Characterization === | |||
* [[Your New Electrical Test Tool]] <!-- ← Replace this with the actual tool name, e.g. [[Keithley 4200-SCS]] or [[Probe Station with SMUs]] --> | |||
== Packaging & Mechanical Tooling == | |||
=== Wafer and Die Processing === | |||
* [[Ball & Wedge bonder]] | |||
* [[Dicing Saw]] | |||
* [[Mini Polisher]] | |||
* [[LatticeAx Cleaver]] | |||
* [[FlipScribe Cleaver]] | |||
* [[Vacuum Bag Sealer]] | |||
=== | == PCB Processing == | ||
* [[LPKF PCB mill]] | |||
* [[LPKF electroplater]] | |||
== Wet Process == | |||
=== Fume Hoods & Stations === | |||
* Solvent Fume Hood (Metrology bay) | |||
** [[Heated ultrasonic bath]] (Solvent hood) | |||
** [[Torrey Pines hot plate]] (Solvent hood) | |||
** Solvent drains | |||
** N2 sprayers | |||
* Acid Fume Hood – Left (Etch bay) – Piranha & Nanostrip allowed | |||
** [[Imtec Accubath]] (Acid left) | |||
** Quick-dump-rinse tank (QDR) | |||
** DI water tap | |||
** N2 gun | |||
* Acid Fume Hood – Right (Etch bay) – No Piranha/Nanostrip | |||
** [[Imtec Accubath]] (Acid right) | |||
** [[Torrey Pines hot plate]] (Acid right – left & right units) | |||
** Quick-dump-rinse tank (QDR) | |||
** DI water tap | |||
** N2 sprayer | |||
* Resist Fume Hood (Advanced Photo bay) | |||
** [[Laurell Spinner]] (left & right) | |||
** [[Apogee Bake Plate]] (1–4) | |||
* Base & Developer Fume Hood – Left (Advanced Photo bay) | |||
** [[Imtec Accubath]] (Developer left) | |||
** [[Torrey Pines hot plate]] (Developer left) | |||
** Quick-dump-rinse tank (QDR) | |||
** DI water tap | |||
** N2 sprayer | |||
* Base & Developer Fume Hood – Right (Advanced Photo bay) | |||
** [[Imtec Accubath]] (Developer right) | |||
** [[Torrey Pines hot plate]] (Developer right) | |||
** Quick-dump-rinse tank (QDR) | |||
** DI water tap | |||
** N2 sprayer | |||
* E-beam Resist Fume Hood (Photo bay) | |||
** [[Headway Spinner]] (left & right) | |||
** [[Apogee Hot Plate]] (left & right – ebeam) | |||
** Ultrasonic heated bath | |||
** [[Torrey Pines hot plate / stirrer]] (ebeam hood) | |||
* [[Oxford PECVD]] | * [[Oxford PECVD]] | ||
* [[Veeco ALD]] | * [[Veeco ALD]] | ||
Revision as of 13:28, 17 February 2026
Tool Categories |
Anneal & Furnace
- [[RTA (Rapid Thermal Annealer
Tool Categories |
Anneal & Furnace
- RTA (Rapid Thermal Annealer)
- Cascade Tek vacuum oven
- Blue M furnace big
- Blue M furnace little
- Narco vacuum oven
Deposition
CVD (Chemical Vapor Deposition)
PVD (Physical Vapor Deposition)
- Angstrom Evaporator
- CHA Evaporator
- KJL Evaporator
- Temescal Metal e-beam evaporator (Not in service)
- KJL Sputter
Dry Etching & Plasma Cleaning
Etchers
- Oxford DRIE
- Oxford DRIE-ALE (being commissioned)
- Oxford III-V
- Oxford RIE
- XeF2 etcher
Plasma Cleaning / Ashing
- Tegal O2 Plasma Asher
- Tegal Plasma (not in operation)
- YES O2 Plasma
Lithography
E-beam and Laser
UV Mask Aligners
Metrology and testing
Assorted Metrology
Microscopes
- Desktop SEM
- Nikon LV 150 optical microscope
- Max ERB optical microscope
- Zeiss optical microscope
- Nikon SMZ-10A optical microscope
- Nikon optical microscope
Electrical Characterization
Packaging & Mechanical Tooling
Wafer and Die Processing
PCB Processing
Wet Process
Fume Hoods & Stations
- Solvent Fume Hood (Metrology bay)
- Heated ultrasonic bath (Solvent hood)
- Torrey Pines hot plate (Solvent hood)
- Solvent drains
- N2 sprayers
- Acid Fume Hood – Left (Etch bay) – Piranha & Nanostrip allowed
- Imtec Accubath (Acid left)
- Quick-dump-rinse tank (QDR)
- DI water tap
- N2 gun
- Acid Fume Hood – Right (Etch bay) – No Piranha/Nanostrip
- Imtec Accubath (Acid right)
- Torrey Pines hot plate (Acid right – left & right units)
- Quick-dump-rinse tank (QDR)
- DI water tap
- N2 sprayer
- Resist Fume Hood (Advanced Photo bay)
- Laurell Spinner (left & right)
- Apogee Bake Plate (1–4)
- Base & Developer Fume Hood – Left (Advanced Photo bay)
- Imtec Accubath (Developer left)
- Torrey Pines hot plate (Developer left)
- Quick-dump-rinse tank (QDR)
- DI water tap
- N2 sprayer
- Base & Developer Fume Hood – Right (Advanced Photo bay)
- Imtec Accubath (Developer right)
- Torrey Pines hot plate (Developer right)
- Quick-dump-rinse tank (QDR)
- DI water tap
- N2 sprayer
- E-beam Resist Fume Hood (Photo bay)
- Headway Spinner (left & right)
- Apogee Hot Plate (left & right – ebeam)
- Ultrasonic heated bath
- Torrey Pines hot plate / stirrer (ebeam hood)
- Oxford PECVD
- Veeco ALD
PVD (Physical Vapor Deposition)
- Angstrom Evaporator
- CHA Evaporator
- KJL Evaporator
- Temescal Metal e-beam evaporator (Not in service)
- KJL Sputter
Dry Etching & Plasma Cleaning
Etchers
- Oxford DRIE
- Oxford DRIE-ALE (being commissioned)
- Oxford III-V
- Oxford RIE
- XeF2 etcher
Plasma Cleaning / Ashing
- Tegal O2 Plasma Asher
- Tegal Plasma (not in operation)
- YES O2 Plasma
Lithography
E-beam and Laser
UV Mask Aligners
Metrology and testing
Assorted Metrology
Microscopes
- Desktop SEM
- Nikon LV 150 optical microscope
- Max ERB optical microscope
- Zeiss optical microscope
- Nikon SMZ-10A optical microscope
- Nikon optical microscope
Packaging & Mechanical Tooling
Wafer and Die Processing
PCB Processing
Wet Process
Fume Hoods & Stations
- Solvent Fume Hood (Metrology bay)
- Heated ultrasonic bath (Solvent hood)
- Torrey Pines hot plate (Solvent hood)
- Solvent drains
- N2 sprayers
- Acid Fume Hood – Left (Etch bay) – Piranha & Nanostrip allowed
- Imtec Accubath (Acid left)
- Quick-dump-rinse tank (QDR)
- DI water tap
- N2 gun
- Acid Fume Hood – Right (Etch bay) – No Piranha/Nanostrip
- Imtec Accubath (Acid right)
- Torrey Pines hot plate (Acid right – left & right units)
- Quick-dump-rinse tank (QDR)
- DI water tap
- N2 sprayer
- Resist Fume Hood (Advanced Photo bay)
- Laurell Spinner (left & right)
- Apogee Bake Plate (1–4)
- Base & Developer Fume Hood – Left (Advanced Photo bay)
- Imtec Accubath (Developer left)
- Torrey Pines hot plate (Developer left)
- Quick-dump-rinse tank (QDR)
- DI water tap
- N2 sprayer
- Base & Developer Fume Hood – Right (Advanced Photo bay)
- Imtec Accubath (Developer right)
- Torrey Pines hot plate (Developer right)
- Quick-dump-rinse tank (QDR)
- DI water tap
- N2 sprayer
- E-beam Resist Fume Hood (Photo bay)
- Headway Spinner (left & right)
- Apogee Hot Plate (left & right – ebeam)
- Ultrasonic heated bath
- Torrey Pines hot plate / stirrer (ebeam hood)