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== Dry Etching & Plasma Cleaning == | == Dry Etching & Plasma Cleaning == | ||
=== Etchers === | === Etchers === | ||
* [[Oxford III-V]] | |||
* [[Oxford RIE]] | |||
* [[Oxford DRIE]] | * [[Oxford DRIE]] | ||
* [[Oxford DRIE-ALE]] | * [[Oxford DRIE-ALE]] | ||
* [[XeF2 etcher]] | * [[XeF2 etcher]] | ||
Latest revision as of 10:45, 4 June 2026
Tool Categories |
Anneal & Furnace
- RTA (Rapid Thermal Annealer)
- Cascade Tek vacuum oven
- Blue M furnace big
- Blue M furnace little
- Narco vacuum oven
Deposition
CVD (Chemical Vapor Deposition)
PVD (Physical Vapor Deposition)
- Angstrom Evaporator
- CHA Evaporator
- KJL Evaporator
- Temescal Metal e-beam evaporator (Not in service)
- KJL Sputter
Dry Etching & Plasma Cleaning
Etchers
Plasma Cleaning / Ashing
- Tegal O2 Plasma Asher
- Tegal Plasma (not in operation)
- YES O2 Plasma
Lithography
E-beam and Laser
UV Mask Aligners
Metrology and testing
Assorted Metrology
Microscopes
- Desktop SEM
- Nikon LV 150 optical microscope
- Max ERB optical microscope
- Zeiss optical microscope
- Nikon SMZ-10A optical microscope
- Nikon optical microscope
Electrical Characterization
- Electroglas 4080X – Automated wafer prober
- Keithley S530 Parametric Test System – Parametric analyzer
Packaging & Mechanical Tooling
Wafer and Die Processing
PCB Processing
Wet Process
Fume Hoods & Stations
- Solvent Fume Hood (Metrology bay)
- Heated ultrasonic bath (Solvent hood)
- Torrey Pines hot plate (Solvent hood)
- Solvent drains
- N2 sprayers
- Acid Fume Hood – Left (Etch bay) – Piranha & Nanostrip allowed
- Imtec Accubath (Acid left)
- Quick-dump-rinse tank (QDR)
- DI water tap
- N2 gun
- Acid Fume Hood – Right (Etch bay) – No Piranha/Nanostrip
- Imtec Accubath (Acid right)
- Torrey Pines hot plate (Acid right – left & right units)
- Quick-dump-rinse tank (QDR)
- DI water tap
- N2 sprayer
- Resist Fume Hood (Advanced Photo bay)
- Laurell Spinner (left & right)
- Apogee Bake Plate (1–4)
- Base & Developer Fume Hood – Left (Advanced Photo bay)
- Imtec Accubath (Developer left)
- Torrey Pines hot plate (Developer left)
- Quick-dump-rinse tank (QDR)
- DI water tap
- N2 sprayer
- Base & Developer Fume Hood – Right (Advanced Photo bay)
- Imtec Accubath (Developer right)
- Torrey Pines hot plate (Developer right)
- Quick-dump-rinse tank (QDR)
- DI water tap
- N2 sprayer
- E-beam Resist Fume Hood (Photo bay)
- Headway Spinner (left & right)
- Apogee Hot Plate (left & right – ebeam)
- Ultrasonic heated bath
- Torrey Pines hot plate / stirrer (ebeam hood)